Abstract:
The invention provides an abrasive article (22, 122), and methods for the use and the manufacture of the article. The abrasive article comprises an abrasive surface (224); and a performance index associated with the abrasive article, the index indicating an aspect of the abrasive performance of the article. In abrasive applications, the performance index is used to determine initial process conditions under which the abrasive article (22, 122) will abrade a workpiece. A process for making the abrasive article comprises (a) providing an abrasive article (22, 122) having an abrasive surface (224); (b) providing a workpiece (30, 132) having an abradable surface thereon; (c) abrading the abradable surface by applying the abrasive surface (224) against the abradable surface at a known applied pressure and velocity and relatively moving the abrasive article (22, 122) and the abradable surface during a predetermined period of time; (d) devising a performance index based on the abrasive performance of the abrasive article during the abrading step (c); and (e) associating the performance index with the abrasive article (22, 122).
Abstract:
A lapping carrier includes a base having first and second opposed major surfaces and at least one aperture extending from the first major surface to the second major surface. A wear layer is disposed on the first major surface of the base. The wear layer includes an outer polymer layer comprising at least one of polyether ether ketone or ultrahigh molecular weight polyethylene, and a first adhesive layer disposed between the outer polymer layer and the base
Abstract:
Provided is an abrasive article comprising (a) a metallic foil having a first and second surfaces and voids therebetween, (b) a plurality of abrasive particles substantially in the voids, and (c) an alloy at least partially between the abrasive particles and the foil in the voids, wherein the alloy comprises a second component and a portion of the metallic foil near the voids. Also provided are methods of making and using such abrasive articles.
Abstract:
In general, techniques are described that allow an abrasive manufacturing process to achieve a controlled performance parameter, e.g., an amount of material removal, without requiring the use of feedback controls within the abrasive manufacturing process. For example, a system includes a machine to abrade a workpiece with an abrasive article, and a controller to control the application of the abrasive article to the workpiece by the machine to achieve a substantially constant cut rate for the abrasive article. The controller controls one or more process variables in accordance with an open-loop mathematical model that relates the cut rate of the abrasive article to an application force of the abrasive article to achieve controlled material removal. For example, a constant rate of cut can be achieved or a fixed amount of material can be removed while abrading one or more workpiece in accordance with the model.
Abstract:
Edge modifying apparatuses that include a disc chuck, a disc edge modifying unit having an abrasive article support, and a uniform velocity linear oscillation driver coupled to at least one of the disc chuck and the abrasive article support are described. The uniform velocity linear oscillation driver provides a substantially constant velocity for at least 80% of each half-cycle of oscillation. Methods of modifying the edge of disc using such apparatuses are also described.
Abstract:
A pad conditioner having an abrasive disk (12) and an undulating disk (10) and methods for using the same. The undulating disk (10) has at least one raised portion (26) and at least one recessed portion (28). The abrasive disk (12) is releasably affixed to at least a portion of the recessed (28) portion to form an undulated abrasive surface (16). The undulating disk (10) allows the pad conditioner to be modified for use with multiple processes and for a variety of workpieces.
Abstract:
A wafer planarization process with a conditioning tool (14) having an electrical insulator that electrically insulates the abrasive surface of the conditioning tool (14). The electrical insulator extends the useful life of the abrasive surface of the conditioning tool (14) by reducing the level of electrochemically driven corrosion.