公开(公告)号：WO2023089426A1

公开(公告)日：2023-05-25

申请号：PCT/IB2022/060392

申请日：2022-10-28

Applicant: 3M INNOVATIVE PROPERTIES COMPANY

Inventor： ARMSTRONG, Paul B. ,  ZHU, James ,  HUNT, Lucas J. ,  LEONE, Amanda K. ,  MAHONEY, Wayne S. ,  SONNIER, Ashley R.

IPC: G03F7/00 ,  B82Y40/00 ,  C08F220/14 ,  C09D133/12

Abstract: Described herein is methacrylate copolymer derived from: a (meth)acrylate monomer comprising a second terminal olefin group; an alkyl methacrylate monomer wherein the alkyl group comprises 1 to 4 carbon atoms; a mono(meth)acrylate monomer comprising a low-surface-energy group, wherein the low-surface-energy group comprises a perfluorinated alkyl group, a perfluorinated polyether group, or a silicone group; and a RAFT agent. Such copolymers can be used to make liquid compositions, which may then be used to generate tooling for nanoimprint or transfer lithography.

公开(公告)号：WO2022144773A1

公开(公告)日：2022-07-07

申请号：PCT/IB2021/062391

申请日：2021-12-28

Applicant: 3M INNOVATIVE PROPERTIES COMPANY

Inventor： SONNIER, Ashley R. ,  ZHU, James ,  HUNT, Lucas J. ,  KUSILEK, Edwin L. ,  ARMSTRONG, Paul B.

IPC: G03F7/00

Abstract: Methods of forming an array of patterns on a substrate are provided. A replication medium is coated onto a relief structure of a patterned template and solidified. Patterned templates with the replication medium are transferred to an array of sub-regions of a tiling region of a substrate, where heat and/or radiation can be applied to the replication medium. The patterned templates are then removed from the substrate to form a patterned surface structure on the substrate.

公开(公告)号：WO2022136992A1

公开(公告)日：2022-06-30

申请号：PCT/IB2021/061453

申请日：2021-12-08

Applicant: 3M INNOVATIVE PROPERTIES COMPANY

Inventor： HUNT, Lucas J. ,  SONNIER, Ashley R. ,  ZHU, James ,  KUSILEK, Edwin L. ,  ARMSTRONG, Paul B. ,  KOLB, William B. ,  NELSON, Caleb T. ,  SOLOMON, Jeffrey L. ,  NELSON, James M. ,  HEI, Samuel R. ,  TARNOWSKI, David J. ,  VAN LENGERICH, Henrik B.

IPC: G03F7/00

Abstract: Methods of forming an array of patterns on a substrate are provided. An array of protective tiles formed from a protectant resin is provided to cover an array of sub-regions on the substrate. An array of patterns is formed on the substrate by sequentially repeating steps (i) and (ii) for each sub-region: (i) removing the protective tile from one of the sub-regions to expose the first major surface underneath; and (ii) forming a pattern on the exposed first major surface within the one of the sub-regions.