公开(公告)号：WO2016077270A1

公开(公告)日：2016-05-19

申请号：PCT/US2015/059828

申请日：2015-11-10

Applicant: APPLIED MATERIALS, INC.

Inventor： THIRUNAVUKARASU, Sriskantharajah ,  PEH, Eng Sheng ,  NEMANI, Srinivas D. ,  SUNDARRAJAN, Arvind ,  AVULA, Avinash ,  YIEH, Ellie Y. ,  RICE, Michael ,  ADDIEGO, Ginetto

IPC: H01L21/677 ,  H01L21/673

CPC classification number: H01L21/67389 ,  B25J11/0095 ,  H01L21/67363 ,  H01L21/67369

Abstract: Embodiments of multi-cassette carrying cases are provided herein. In some embodiments a multi-cassette carrying case includes: a body having an inner volume; a door coupled to the body to selectively seal off the inner volume; and a plurality of cassette holders disposed in the inner volume to hold one or more substrate cassettes. In some embodiments, a method of transferring substrates includes: placing a substrate in a substrate cassette, wherein an inner volume of the substrate cassette is sealed from an environment outside of the substrate cassette; and placing the substrate cassette in a multi-cassette carrying case.

Abstract translation: 这里提供了多盒式携带箱的实施例。 在一些实施例中，多盒式手提箱包括：具有内部容积的主体; 一个门连接到主体以选择性地密封内部容积; 以及设置在所述内部容积中以容纳一个或多个衬底盒的多个盒座。 在一些实施例中，传送衬底的方法包括：将衬底放置在衬底盒中，其中衬底盒的内部体积与衬底盒外的环境密封; 并将衬底盒放置在多盒式手提箱中。