公开(公告)号：WO2021167587A1

公开(公告)日：2021-08-26

申请号：PCT/US2020/018546

申请日：2020-02-18

Applicant: APPLIED MATERIALS, INC.

Inventor： KANG, ChungShin ,  YANG, Jun ,  JI, Hongbin

IPC: G03F7/20

Abstract: In embodiments of a digital lithography system, physical design data prepared at a data prep server in a hierarchical data structure. A leaf node comprises a repeater nod, comprising a bitmap image and a plurality of locations at which the bitmap appears in a physical design. At an EYE server, a repeater node bitmap is adjusted based upon, for example, spatial light modulator rotational adjustment and substrate distortion. The adjusted repeater node and the plurality of locations in which the adjusted repeater appears is compared to the repeater of the data prep server and its plurality of locations. In further embodiments, a rasterizer generates a checksum of bitmap to be printed to a substrate, from the EYE server bitmap. The checksum is compared to a checksum of the EYE server bitmap.

公开(公告)号：WO2021076120A1

公开(公告)日：2021-04-22

申请号：PCT/US2019/056512

申请日：2019-10-16

Applicant: APPLIED MATERIALS, INC.

Inventor： KANG, Chung-Shin ,  JI, Hongbin ,  COSKUN, Tamer ,  CHEN, Jang Fung ,  CHUNDER, Anindarupa ,  VAN DEN BROEKE, Douglas

IPC: G03F7/20 ,  H01L21/027 ,  H01L21/66 ,  H01L21/67

Abstract: Embodiments disclosed herein relate to lithography systems and methods of making patterns. The lithography system includes various components for creating masks, patterning substrates, performing metrology on the patterned substrates, and comparing metrology values to the mask. The method of forming patterns includes comparing the patterned substrate to the mask, and determining a new mask that incorporates the corrections in patterning from the previous mask. The method can be repeated several times, in order to sequentially improve the quality of the mask used for lithography in the lithography system. The integrated lithography system reduces time of use and cost for the user.

公开(公告)号：WO2006052828A2

公开(公告)日：2006-05-18

申请号：PCT/US2005/040172

申请日：2005-11-03

Applicant: APPLIED MATERIALS, INC.

Inventor： WHITE, John, M. ,  SZE, Fan Cheung ,  SHANG, Quanyuan ,  KURITA, Shinichi ,  JI, Hongbin ,  JOZWIAK, Janusz ,  HUANG, Inchen ,  BEER, Emanual

IPC: B41J3/407 ,  G02B5/20

CPC classification number: B41J25/003 ,  B41J3/407 ,  B41J3/543 ,  G02F1/1303 ,  G02F1/133516

Abstract: In a first aspect, a system is provided for inkjet printing. The system includes (1) at least one apparatus for inkjet printing having (a) a first inkjet print head including a first plurality of nozzles adapted to selectively dispense a first ink; (b) a second inkjet print head including a second plurality of nozzles adapted to selectively dispense a second ink; and (c) a set including the first and second print heads arranged such that the set is adapted to dispense the first and second inks into respective adjacent color wells of a display pixel on a substrate during a printing pass; and (2) a stage adapted'to support the substrate and transport the substrate below the at least one apparatus for inkjet printing during the printing pass. Numerous other aspects are provided.

Abstract translation: 在第一方面中，提供了一种用于喷墨打印的系统。 该系统包括（1）用于喷墨印刷的至少一个装置，其具有（a）第一喷墨印刷头，该第一喷墨印刷头包括适于选择性地分配第一油墨的第一多个喷嘴; （b）第二喷墨打印头，其包括适于选择性地分配第二墨的第二多个喷嘴; （c）一组包括第一和第二打印头的组，所述组被布置为使得所述组适合于在打印过程中将所述第一和第二油墨分配到基板上的显示像素的各个相邻的彩色井中; 和（2）适于支撑基底并在印刷过程中将基底传送到至少一个装置下方用于喷墨印刷的台。 还提供了许多其他方面。

公开(公告)号：WO2006089105A2

公开(公告)日：2006-08-24

申请号：PCT/US2006/005614

申请日：2006-02-17

Applicant: APPLIED MATERIALS, INC.

Inventor： SHAMOUN, Bassam ,  JOZWIAK, Janusz ,  SHANG, Quanyuan ,  JI, Hongbin

IPC: B41J2/21 ,  B41J2/045 ,  G02F1/1335 ,  B41M3/00

CPC classification number: B41J2/2128 ,  B41J2/04541 ,  B41J2/0456 ,  B41J2/04581 ,  B41J2/04591 ,  B41J2/04593 ,  B41J2202/09 ,  G02F1/133516 ,  H04N1/4015

Abstract: The present invention provides methods and apparatus for controlling the quantity of fluid output (e.g., drop size) by individual nozzles of a print head to a very high precision at a frequency equal to the frequency at which fluid is normally dispensed. This is achieved by mapping fluid quantity control information into the data that represents the image to be printed. Data representative of an image is received and converted into pixel data. In at least one embodiment, the pixel data includes pixels represented by N bits, and the N bits may represent a drop size for the pixel and a union of the N bits may represent a nozzle status. A print head may be controlled based on the pixel data, and the print head may include nozzles that are each adapted to deposit at least one drop size quantity of a fluid on a substrate.

Abstract translation: 本发明提供了用于以等于通常分配流体的频率的频率将打印头的各个喷嘴的流体输出量（例如，液滴尺寸）控制到非常高的精度的方法和装置。 这通过将流体量控制信息映射到表示要打印的图像的数据来实现。 接收表示图像的数据并将其转换为像素数据。 在至少一个实施例中，像素数据包括由N位表示的像素，并且N位可以表示像素的液滴大小，并且N位的并联可以表示喷嘴状态。 可以基于像素数据来控制打印头，并且打印头可以包括各自适于在衬底上沉积至少一个液滴量的流体的喷嘴。