公开(公告)号：WO2021202611A1

公开(公告)日：2021-10-07

申请号：PCT/US2021/025002

申请日：2021-03-30

Applicant: APPLIED MATERIALS, INC.

Inventor： WIRTH, Paul, Z. ,  AMIR, Ofer ,  KUCHAR, Michael, C.

IPC: H01L21/67 ,  F16K51/02 ,  F15B21/02 ,  F16K3/0254 ,  F16K31/124 ,  F16K37/0041 ,  H01L21/67017 ,  H01L21/67739

Abstract: Disclosed are a slit valve apparatus and a method for controlling a slit valve. The slit valve apparatus includes a slit valve assembly and a servo-control system in communication with the slit valve assembly. The slit valve assembly includes at least one gate able to transition between an open position and a closed position, at least one pneumatic actuator, at least one proportional pneumatic valve including a plurality of controllers, and a continuous position sensor. The servo-control system includes a centralized controller that generates a control signal and adjusts the movement of the at least one gate based on the position trajectory for the gate, a linear position measurement of the gate from the continuous position sensor, and fluid pressure/flow measurements from the plurality of controllers.