公开(公告)号：WO2020027991A1

公开(公告)日：2020-02-06

申请号：PCT/US2019/041056

申请日：2019-07-09

Applicant: APPLIED MATERIALS, INC.

Inventor： HUANG, Zubin ,  WHITE, Sarah Langlois ,  BAKKE, Jonathan Robert ,  KEDLAYA, Diwakar N. ,  ROCHA, Juan Carlos ,  RUAN, Fang

IPC: G01N15/02 ,  G01N15/06 ,  G01N21/3504 ,  H01L21/67 ,  H01L21/66

Abstract: Systems and methods used to deliver a processing gas having a desired diborane concentration to a processing volume of a processing chamber are provided herein. In one embodiment a system includes a borane concentration sensor. The borane concentration sensor includes a body and a plurality of windows. Here, individual ones of the plurality of windows are disposed at opposite ends of the body and the body and the plurality of windows collectively define a cell volume. The borane concentration sensor further includes a radiation source disposed outside of the cell volume proximate to a first window of the plurality of windows, and a radiation detector disposed outside the cell volume proximate to a second window of the plurality of windows.