公开(公告)号：WO0122162A3

公开(公告)日：2008-03-06

申请号：PCT/US0022141

申请日：2000-08-11

Applicant: ARCH SPEC CHEM INC

Inventor： FOSTER PATRICK ,  BIAFORE JOHN JOSEPH ,  SLATER SIDNEY GEORGE ,  STEINHAUSLER THOMAS

IPC: G03F7/004 ,  C08F120/10 ,  C08F130/08 ,  G03F7/039 ,  G03F7/075 ,  G03F7/30

CPC classification number: G03F7/0758 ,  G03F7/0045 ,  G03F7/039

Abstract: Radiation sensitive resins for use as a top layer resist in a bilayer system for use in deep UV photolithography comprises derivatized copolymers having structural units (1), (2), (3) and (4) wherein n is 1 to 5, R is an alkyl group, R 1 a methyl or trimethylsiloxy, R 3 is hydrogen or methyl and R 2 and R 4 are each tert-butyl groups.

Abstract translation: 用于深紫外光刻的双层体系中用作顶层抗蚀剂的辐射敏感树脂包括具有结构单元（1），（2），（3）和（4）的衍生化共聚物，其中n为1至5，R为 烷基，R 1，甲基或三甲基甲硅烷氧基，R 3是氢或甲基，R 2和R 4 >各为叔丁基。

公开(公告)号：WO02073307A3

公开(公告)日：2002-11-21

申请号：PCT/US0207136

申请日：2002-03-07

Applicant: ARCH SPEC CHEM INC

Inventor： BINOD B DE ,  MALIK SANJAY ,  SPAZIANO GREGORY DOMINIC ,  BIAFORE JOHN JOSEPH ,  FOSTER PATRICK ,  SLATER SIDNEY GEORGE ,  STEINHAUSLER THOMAS ,  BLAKENEY ANDREW J

IPC: G03F7/11 ,  C08F220/10 ,  G03F7/09 ,  H01L21/027 ,  C08F8/32 ,  B32B27/06 ,  C08F36/20 ,  C08F236/20 ,  C08L45/00 ,  G03C1/93

CPC classification number: G03F7/094 ,  G03F7/091

Abstract: Thermally cured undercoat for use in lithography of a thermally cured composition comprising a hydroxyl-containing polymer, an amino cross-linking agent and a thermal acid generator, wherein the hydroxyl containing polymer is a polymer comprising units m, n and o of the formula (I) wherein R is H or methyl; R is a substituted or unsubstituted C6-C14 aryl acrylate or C6-C14 aryl methacrylate group wherein the substituted groups may be phenyl, Cl-4 alkyl or C1-4 alkoxy; R is a hydroxyl functionalized Cl-C8 alkyl acrylate, methacrylate or C6-C14 aryl group, R is a C1-C10 linear or branched alkylene; p is an integer of from 1 to 5 with the proviso that there are no more than thirty carbon atoms in the [-R O-]p ; R is a Cl-C10 linear, branched or cyclic alkyl, substituted or unsubstituted C6-Cl4 aryl, or substituted or unsubstituted C7-Cl5 alicyclic hydrocarbon; and m is about 40 to 70, n is about 15 to 35 and o is about 15 to 25.

Abstract translation: 用于平版印刷的热固化的底涂层，所述热固化的组合物包含含羟基的聚合物，氨基交联剂和热酸产生剂，其中所述含羟基的聚合物是包含式（m）的单元m，n和o的聚合物 I）其中R 1是H或甲基; R 2是取代或未取代的C 6 -C 14芳基丙烯酸酯或C 6 -C 14芳基甲基丙烯酸酯基团，其中取代基团可以是苯基，C 1-4烷基或C 1-4烷氧基; R 3是羟基官能化的C 1 -C 8烷基丙烯酸酯，甲基丙烯酸酯或C 6 -C 14芳基，R 4是C 1 -C 10直链或支链亚烷基; p为1至5的整数，条件是[-R 4 O-] p中不超过30个碳原子; R 5为C 1 -C 10直链，支链或环状烷基，取代或未取代的C 6 -C 14芳基或取代或未取代的C 7 -C 15脂环烃; m约为40-70，n约为15-35，o约为15-25。