公开(公告)号：WO2020114829A1

公开(公告)日：2020-06-11

申请号：PCT/EP2019/082502

申请日：2019-11-26

Applicant: ASML HOLDING N.V.

Inventor： ANDERSSON, Greger, Göte ,  AARTS, Igor, Matheus, Petronella ,  DASTOURI, Zahrasadat ,  SHOME, Krishanu

IPC: G03F7/20 ,  G03F9/00

Abstract: A method of applying a measurement correction includes determining an orthogonal subspace used to characterize a first principal component of the measurement and a second principal component of the measurement, and rotating the orthogonal subspace by a first angle such that the first principle component rotates to become a first factor vector and the second principle component rotates to become a second factor vector. An asymmetry vector is generated by rotating the second factor vector by a second angle, where the asymmetry vector and the first factor vector define a non-orthogonal subspace. An asymmetry contribution is determined in the measurement based on the projection of the measurement onto the first factor vector in the non- orthogonal subspace. The method also includes subtracting the asymmetry contribution from the measurement.

公开(公告)号：WO2021233642A1

公开(公告)日：2021-11-25

申请号：PCT/EP2021/060595

申请日：2021-04-22

Applicant: ASML HOLDING N.V. ,  ASML NETHERLANDS B.V.

Inventor： DASTOURI, Zahrasadat ,  AARTS, Igor, Matheus, Petronella ,  MATHIJSSEN, Simon, Gijsbert, Josephus ,  ENGBLOM, Peter, David

IPC: G03F9/00

Abstract: A method for generating an alignment signal is described. The method comprises detecting local dimensional distortions of an alignment mark and generating the alignment signal based on the alignment mark. The alignment signal is weighted based on the local dimensional distortions of the alignment mark. Detecting the local dimensional distortions comprises: irradiating the alignment mark with radiation, the alignment mark comprising a geometric feature; and detecting one or more phase and/or amplitude shifts in reflected radiation from the geometric feature. The one or more phase and/or amplitude shifts correspond to the local dimensional distortions of the geometric feature. A parameter of the radiation, an alignment inspection location within the geometric feature, an alignment inspection location on a layer of a structure, and/or a radiation beam trajectory across the geometric feature may be determined based on the one or more detected phase and/or amplitude shifts.

公开(公告)号：WO2020126816A1

公开(公告)日：2020-06-25

申请号：PCT/EP2019/084870

申请日：2019-12-12

Applicant: ASML HOLDING N.V.

Inventor： DASTOURI, Zahrasadat ,  ANDERSSON, Greger, Göte ,  SHOME, Krishanu ,  AARTS, Igor, Matheus, Petronella

IPC: G03F9/00

Abstract: A method of applying a measurement correction includes determining an orthogonal subspace used to characterize the measurement as a plot of data. A first axis of the orthogonal subspace corresponds to constructive interference output from an interferometer of the metrology system plus a first error variable and a second axis of the orthogonal subspace corresponds to destructive interference output from the interferometer of the metrology system plus a second error variable. The method also includes determining a slope of the plot of data and determining a fitted line to the plot of data in the orthogonal subspace based on the slope.