公开(公告)号：WO2022073679A1

公开(公告)日：2022-04-14

申请号：PCT/EP2021/073138

申请日：2021-08-20

Applicant: ASML NETHERLANDS B.V.

Inventor： BUSTRAAN, Krijn, Frederik ,  GIJSBERTSEN, Arjan ,  VAN DONGEN, Paul ,  ACAN, Ibrahim

IPC: G03F7/20 ,  H01L21/687

Abstract: The invention provides a substrate holder to hold a substrate in a substrate holding position, comprising: a frame, multiple surface clamping devices arranged on the frame to clamp a substrate at an upper surface thereof, wherein the surface clamping devices each have a clamping pad to be arranged on the upper surface of the substrate, the surface clamping pads being movable with respect to each other at least in a first direction substantially perpendicular to the upper surface of a substrate held by the surface clamping pads, and one or more actuators to move the surface clamping pads with respect to each other in the first direction.