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公开(公告)号：WO2020057859A1
公开(公告)日：2020-03-26
申请号：PCT/EP2019/071531
申请日：2019-08-12
Applicant: ASML NETHERLANDS B.V.
Inventor： TEDROW, Jon, David , BESSEMS, David , CHEN, Wei-Hsun
Abstract: A conduit suitable for use in a high temperature, high pressure environment, the conduit having an elongate portion made of a first refractory metal and a fitting portion made of a second refractory metal attached to an axial end of the elongate portion. The attachment may be made by welding and the second refractory metal may have a greater yield strength than the first refractory metal.
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