公开(公告)号：WO2020057859A1

公开(公告)日：2020-03-26

申请号：PCT/EP2019/071531

申请日：2019-08-12

Applicant: ASML NETHERLANDS B.V.

Inventor： TEDROW, Jon, David ,  BESSEMS, David ,  CHEN, Wei-Hsun

IPC: F16L25/00 ,  F16L13/04 ,  H05G2/00

Abstract: A conduit suitable for use in a high temperature, high pressure environment, the conduit having an elongate portion made of a first refractory metal and a fitting portion made of a second refractory metal attached to an axial end of the elongate portion. The attachment may be made by welding and the second refractory metal may have a greater yield strength than the first refractory metal.

公开(公告)号：WO2021239382A1

公开(公告)日：2021-12-02

申请号：PCT/EP2021/061258

申请日：2021-04-29

Applicant: ASML NETHERLANDS B.V.

Inventor： SWERDLOW, Ethan, Marcus ,  BESSEMS, David ,  TEDROW, Jon, David ,  RAI, Sandeep ,  CAVALIER, Grant, Steven ,  DRIESSEN, Theodorus, Wilhelmus ,  SAMS, Benjamin, Andrew ,  TREES, Dietmar, Uwe, Herbert ,  ATENCIO, Edgardo, Zamora ,  JOHNSON, Brandon, Michael

IPC: H05G2/00

Abstract: Systems, apparatuses, and methods are provided for measuring the level of a radiation fuel in an extreme ultraviolet (EUV) radiation system. In one example, a method for measuring the fuel level includes directing an inspection beam through a fuel tank view port at a top surface of the radiation fuel at a predetermined incident angle. The method can further include receiving 5a portion of the inspection beam reflected by the top surface of the radiation fuel at a sensor located adjacent to the view port. Also, the method can include measuring a distance to the top surface of the radiation fuel, and calculating a fill level of the radiation fuel in the fuel tank based on the measured distance.

公开(公告)号：WO2020057858A1

公开(公告)日：2020-03-26

申请号：PCT/EP2019/071530

申请日：2019-08-12

Applicant: ASML NETHERLANDS B.V.

Inventor： TEDROW, Jon, David

IPC: F16L37/10

Abstract: Disclosed is a connector for connecting one fluid handling device (52) such as a conduit to another fluid handling device (70) such as another conduit in which the faces of fittings (54) attached to glands (50) in the connector are given complementary mating configurations (58, 60, 82) so they can mesh that lack circular symmetry so that the faces do not rotate with respect to one another when the faces are subjected to torque when a connection is being made.

公开(公告)号：WO2021121852A1

公开(公告)日：2021-06-24

申请号：PCT/EP2020/082783

申请日：2020-11-20

Applicant: ASML NETHERLANDS B.V.

Inventor： TEDROW, Jon, David

IPC: H05G2/00 ,  H05G2/006

Abstract: An apparatus for an extreme ultraviolet (EUV) light source includes a body. The body includes a first structure (246) including a first wall and a second structure (248) including a second wall permanently joined to the first wall. An interior (203) of the body is at least partially defined by the first wall and the second wall. The first wall includes a first metallic material, and the second wall includes a second metallic material that has a different thermal conductivity than the first metallic material. The interior of the body is configured to be fluidly connected to a target supply system of the EUV light source.

公开(公告)号：WO2020187617A1

公开(公告)日：2020-09-24

申请号：PCT/EP2020/056144

申请日：2020-03-09

Applicant: ASML NETHERLANDS B.V.

Inventor： GOVINDARAJU, Abhiram, Lakshmi Ganesh ,  BESSEMS, David ,  RAI, Sandeep ,  WILLEMS, Petrus, Adrianus ,  KINCAL, Serkan ,  LUKENS, Joshua, Mark ,  TEDROW, Jon, David

IPC: H05G2/00

Abstract: Provided is an apparatus that includes a first reservoir system including a first fluid reservoir configured to be in fluid communication with a nozzle supply system during operation of the nozzle supply system, a second reservoir system including a second fluid reservoir configured to be, at least part of the time during operation of the nozzle supply system, in fluid communication with the first reservoir system, a priming system configured to produce a fluid target material from a solid matter, and a fluid control system fluidly connected to the priming system, the first reservoir system, the second reservoir system, and the nozzle supply system. The fluid control system is configured to, during operation of the nozzle supply system: isolate at least one fluid reservoir and the nozzle supply system from the priming system, and maintain a fluid flow path between at least one fluid reservoir and the nozzle supply system.

公开(公告)号：WO2019057514A1

公开(公告)日：2019-03-28

申请号：PCT/EP2018/074057

申请日：2018-09-06

Applicant: ASML NETHERLANDS B.V.

Inventor： BESSEMS, David ,  TEDROW, Jon, David ,  ODNEAL, Colin, Michael

IPC: G03F7/20 ,  H05G2/00

Abstract: A vessel having a seal that is protected from the liquid material within the vessel by a volume of gas. The vessel has a partition that divides the vessel into two volume spaces such that the seal that is in gaseous communication with the first volume space is protected from the liquid material in the second volume space by a volume of gas in the first volume space.