公开(公告)号：WO2022184479A1

公开(公告)日：2022-09-09

申请号：PCT/EP2022/054191

申请日：2022-02-21

Applicant: ASML NETHERLANDS B.V.

Inventor： CARESIO, Cristina ,  KINYANJUI, Tabitha, Wangari ,  ROGACHEVSKIY, Andrey, Valerievich ,  KNARREN, Bastiaan, Andreas, Wilhelmus, Hubertus ,  CENTENO, Raymund ,  DEN BOER, Jan, Arie ,  TROGRLIC, Viktor

IPC: G03F9/00

Abstract: A method of processing a data set comprising equispaced and/or non-equispaced data samples is disclosed. The method comprises filtering of the data, wherein a kernel defined by a probability density function is convoluted over samples in the data set to perform a weighted average of the samples at a plurality of positions across the data set, and wherein a first order regression is applied to the filtered data to provide a processed data output.

公开(公告)号：WO2021249682A1

公开(公告)日：2021-12-16

申请号：PCT/EP2021/060040

申请日：2021-04-19

Applicant: ASML NETHERLANDS B.V.

Inventor： ROGACHEVSKIY, Andrey, Valerievich ,  KNARREN, Bastiaan, Andreas, Wilhelmus, Hubertus ,  TORUMBA, Doru, Cristian ,  GIJSBERTSEN, Arjan ,  CARESIO, Cristina ,  CENTENO, Raymund ,  KINYANJUI, Tabitha, Wangari ,  DEN BOER, Jan, Arie

IPC: G03F9/00 ,  G03F7/20 ,  G03F7/70783 ,  G03F9/7026 ,  G03F9/7034

Abstract: The present invention provides a method for calculating a corrected substrate height map of a first substrate using a height level sensor. The method comprises: sampling the first substrate by means of the height level sensor with the first substrate moving with a first velocity, wherein the first velocity is a first at least partially non-constant velocity of the first substrate with respect to the height level sensor, to generate a first height level data, generating a first height map based on the first height level data, and calculating a corrected substrate height map by subtracting a correction map from the first height map, wherein the correction map is calculated from the difference between a first velocity height map and a second velocity height map.