公开(公告)号：WO2017060192A1

公开(公告)日：2017-04-13

申请号：PCT/EP2016/073554

申请日：2016-10-03

Applicant: ASML NETHERLANDS B.V.

Inventor： WALLOW, Thomas I. ,  YANG, Peng-cheng ,  LYONS, Adam ,  SHAYEGAN SALEK, Mir Farrokh ,  DILLEN, Hermanus, Adrianus

IPC: G03F7/20 ,  G03F1/36

CPC classification number: G03F1/36 ,  G03F7/70441 ,  G03F7/705 ,  G03F7/70625

Abstract: A method including providing a plurality of unit cells for a plurality of gauge patterns appearing in one or more images of one or more patterning process substrates, each unit cell representing an instance of a gauge pattern of the plurality of gauge patterns, averaging together image information of each unit cell to arrive at a synthesized representation of the gauge pattern, and determining a geometric dimension of the gauge pattern based on the synthesized representation.

Abstract translation: 一种方法，包括提供出现在一个或多个图形化工艺衬底的一个或多个图像中的多个量规图案的多个单位单元，每个单位单元表示多个量规图案的量规图案的实例，使图像信息平均化 以达到量规图形的合成表示，并且基于合成表示确定量规图案的几何尺寸。

公开(公告)号：WO2020141094A1

公开(公告)日：2020-07-09

申请号：PCT/EP2019/086484

申请日：2019-12-19

Applicant: ASML NETHERLANDS B.V.

Inventor： LYONS, Adam ,  WALLOW, Thomas I.

IPC: H01J37/28 ,  G01N23/2251 ,  G01R31/28 ,  G01R31/307

Abstract: A method for scanning a sample by a charged particle beam tool is provided. The method includes providing the sample having a scanning area including a plurality of unit areas, scanning a unit area of the plurality of unit areas, blanking a next unit area of the plurality of unit areas adjacent to the scanned unit area, and performing the scanning and the blanking the plurality of unit areas until all of the unit areas are scanned.