公开(公告)号：WO2020212019A1

公开(公告)日：2020-10-22

申请号：PCT/EP2020/056344

申请日：2020-03-10

Applicant: ASML NETHERLANDS B.V.

Inventor： DERKS, Sander, Catharina, Reinier ,  DIRECKS, Daniel, Jozef, Maria ,  FEIJTS, Maurice, Wilhelmus, Leonardus, Hendricus ,  HOEIJMAKERS, Pieter, Gerardus, Mathijs ,  MOORS, Katja, Cornelia, Joanna, Clasina ,  NAVARRO PAREDES, Violeta ,  VAN DRENT, William, Peter ,  WESTERLAKEN, Jan, Steven, Christiaan

IPC: H05G2/00

Abstract: A contamination trap for use in a debris mitigation system of a radiation source, the contamination trap comprising a plurality of vanes configured to trap fuel debris emitted from a plasma formation region of the radiation source; wherein at least one vane or each vane of the plurality of vanes comprises a material comprising a thermal conductivity above 30 W m -1 K -1 .