公开(公告)号：WO2022135971A1

公开(公告)日：2022-06-30

申请号：PCT/EP2021/085159

申请日：2021-12-10

Applicant: ASML NETHERLANDS B.V.

Inventor： OBERST, Matthias ,  NEUBAUER, Harald Gert Helmut ,  SCHWEIGER, Thomas

IPC: H01J37/244 ,  G01T1/00

Abstract: A monolithic detector may be used in a charged particle beam apparatus. The detector may include a plurality of sensing elements (311) formed on a first side of a semiconductor substrate, each of the sensing elements configured to receive charged particles emitted from a sample and to generate carriers in proportion to a first property of a received charged particle, and a plurality of signal processing components formed on a second side of the semiconductor substrate, the plurality of signal processing components being part of a system configured to determine a value that represents a second property of the received charged particle. The substrate may have a thickness in a range from about 10 to 30 μm. The substrate may include a region configured to insulate the plurality of sensing elements formed on the first side from the plurality of signal processing components formed on the second side.

公开(公告)号：WO2022248296A2

公开(公告)日：2022-12-01

申请号：PCT/EP2022/063382

申请日：2022-05-18

Applicant: ASML NETHERLANDS B.V.

Inventor： BEX, Jan ,  STEPANENKO, Nickolay ,  OBERST, Matthias ,  NEUBAUER, Harald Gert Helmut ,  SCHWEIGER, Thomas ,  STIEGLITZ, Florian, Alfons ,  VOLLMER, Bernd Michael

IPC: G01T1/00 ,  H01J37/244 ,  G01T1/24 ,  G01T1/2928 ,  H01J2237/2441 ,  H01J2237/2448 ,  H01J2237/2817

Abstract: A charged particle detector may include a plurality of sensing elements formed in a substrate, wherein a sensing element of the plurality of sensing elements is formed of a first region on a first side of the substrate, and a second region on a second side of the substrate, the second side being opposite to the first side. The detector may also include a plurality of third regions formed on the second side of the substrate, the third regions including one or more circuit components. The detector may also include an array of fourth regions formed on the second side of the substrate, the array of fourth regions being between adjacent third regions.

公开(公告)号：WO2022128860A1

公开(公告)日：2022-06-23

申请号：PCT/EP2021/085389

申请日：2021-12-13

Applicant: ASML NETHERLANDS B.V.

Inventor： SUNDERMEYER, Jan Louis ,  KLEIN, Leonhard Martin ,  OBERST, Matthias ,  NEUBAUER, Harald Gert Helmut

IPC: H01J37/244

Abstract: An improved readout circuit for a charged particle detector and a method for operating the readout circuit are disclosed. An improved circuit comprises an amplifier configured to receive a signal representing an output of a sensor layer and comprising a first input terminal and an output terminal, a capacitor connected between the first input terminal and the output terminal, and a resistor connected in parallel with the capacitor between the first input terminal and the output terminal. The circuit can be configured to operate in a first mode and a second mode. The capacitor can be adjustable using a capacitance value of the capacitor to enable control of a gain of the circuit operating in the first mode and control of a bandwidth of the circuit operating in the second mode.