公开(公告)号：WO2022248296A2

公开(公告)日：2022-12-01

申请号：PCT/EP2022/063382

申请日：2022-05-18

Applicant: ASML NETHERLANDS B.V.

Inventor： BEX, Jan ,  STEPANENKO, Nickolay ,  OBERST, Matthias ,  NEUBAUER, Harald Gert Helmut ,  SCHWEIGER, Thomas ,  STIEGLITZ, Florian, Alfons ,  VOLLMER, Bernd Michael

IPC: G01T1/00 ,  H01J37/244 ,  G01T1/24 ,  G01T1/2928 ,  H01J2237/2441 ,  H01J2237/2448 ,  H01J2237/2817

Abstract: A charged particle detector may include a plurality of sensing elements formed in a substrate, wherein a sensing element of the plurality of sensing elements is formed of a first region on a first side of the substrate, and a second region on a second side of the substrate, the second side being opposite to the first side. The detector may also include a plurality of third regions formed on the second side of the substrate, the third regions including one or more circuit components. The detector may also include an array of fourth regions formed on the second side of the substrate, the array of fourth regions being between adjacent third regions.