公开(公告)号：WO2021180473A1

公开(公告)日：2021-09-16

申请号：PCT/EP2021/054623

申请日：2021-02-25

Applicant: ASML NETHERLANDS B.V.

Inventor： ZHANG, Jian ,  WANG, Yan ,  TANG, Ljiang ,  WANG, Yixiang

IPC: H01J37/20 ,  G01B11/06 ,  H01J37/21 ,  H01J37/22 ,  H01J37/26 ,  H01J37/28 ,  H01J37/29

Abstract: An improved leveling sensor and method for adjusting a sample height in a charged-particle beam inspection system are disclosed. An improved leveling sensor comprises a light source configured to project a first pattern onto a sample and a detector configured to capture an image of a projected pattern after the first pattern is projected on the sample. The first pattern can comprise an irregularity to enable a determination of a vertical displacement of the sample.