公开(公告)号：WO2022033941A1

公开(公告)日：2022-02-17

申请号：PCT/EP2021/071804

申请日：2021-08-04

Applicant: ASML NETHERLANDS B.V.

Inventor： WALVOORT, Derk, Ferdinand ,  SMITS, Marc ,  VAN DE PEUT, Teunis

IPC: H01J37/02 ,  H01J37/15 ,  H01J37/18

Abstract: Disclosed herein is an actuator arrangement (70) comprising: a wall (504) defining a cavity (71); a casing (72) protruding from the wall (504) and defining an interior (73) in fluid communication with the cavity (71); an actuator (901) comprising: a force imparter (74) configured to impart force on a component in the cavity (71); and an actuation mechanism (75) configured to drive the force imparter (74), wherein at least part of the actuation mechanism (75) is within said interior of the casing (72) and exposed to the cavity (71); and a control element (76) configured to control the actuation mechanism (75), wherein the control element (76) extends through the casing (72) via a seal (77).