公开(公告)号：WO2021249872A1

公开(公告)日：2021-12-16

申请号：PCT/EP2021/064949

申请日：2021-06-03

Applicant: ASML NETHERLANDS B.V.

Inventor： OTTEN, Christiaan ,  CRANS, Peter-Paul ,  SMITS, Marc ,  DEL TIN, Laura ,  TEUNISSEN, Christan ,  HUANG, Yang-Shan ,  STEENBRINK, Stijn, Wilem, Herman, Karel ,  HU, Xuerang ,  XI, Qingpo ,  LUO, Xinan ,  LIU, Xuedong

IPC: H01J37/02 ,  H01J37/18 ,  H01J2237/184 ,  H01J2237/2006 ,  H01J2237/20214 ,  H01J2237/2817 ,  H01J37/023 ,  H01J37/14 ,  H01J37/1477 ,  H01J37/15 ,  H01J37/20 ,  H01J37/244 ,  H01J37/28

Abstract: 2019P00380WO 68 ABSTRACT Disclosed herein is a module for supporting a device configured to manipulate charged particle paths in a charged particle apparatus, the module comprising: a support arrangement configured to support the device, wherein the device is configured to manipulate a charged particle path within the charged particle apparatus; and a support positioning system configured to move the 5 support arrangement within the module; wherein the module is arranged to be field replaceable in the charged particle apparatus. [FIG. 7]

公开(公告)号：WO2021190976A1

公开(公告)日：2021-09-30

申请号：PCT/EP2021/056519

申请日：2021-03-15

Applicant: ASML NETHERLANDS B.V.

Inventor： STORM, Arjen, Benjamin ,  VAN GURP, Johan, Frederik, Cornelis ,  DE LANGEN, Johannes, Cornelis, Jacobus ,  AYAL, Aaron, Yang-Fay ,  BRUININK, Michiel, Matthieu ,  VAN DEN BERG, Christiaan, Ruben ,  OTTEN, Christiaan ,  DINU GURTLER, Laura ,  SMITS, Marc

IPC: H01J37/09 ,  G01N23/2251 ,  H01J37/317 ,  B41J2/14 ,  H01J9/02 ,  H01J29/80 ,  H01J2237/0453 ,  H01J2237/1205 ,  H01J2237/31774 ,  H01J37/3177

Abstract: Disclosed herein is a substrate stack comprising a plurality of substrates, wherein: each substrate in the substrate stack comprises at least one alignment opening set; the at least one alignment opening set in each substrate is aligned for a light beam to pass through corresponding alignment openings in each substrate; and each substrate comprises at least one alignment opening that has a smaller diameter than the corresponding alignment openings in the other substrates.

公开(公告)号：WO2022033941A1

公开(公告)日：2022-02-17

申请号：PCT/EP2021/071804

申请日：2021-08-04

Applicant: ASML NETHERLANDS B.V.

Inventor： WALVOORT, Derk, Ferdinand ,  SMITS, Marc ,  VAN DE PEUT, Teunis

IPC: H01J37/02 ,  H01J37/15 ,  H01J37/18

Abstract: Disclosed herein is an actuator arrangement (70) comprising: a wall (504) defining a cavity (71); a casing (72) protruding from the wall (504) and defining an interior (73) in fluid communication with the cavity (71); an actuator (901) comprising: a force imparter (74) configured to impart force on a component in the cavity (71); and an actuation mechanism (75) configured to drive the force imparter (74), wherein at least part of the actuation mechanism (75) is within said interior of the casing (72) and exposed to the cavity (71); and a control element (76) configured to control the actuation mechanism (75), wherein the control element (76) extends through the casing (72) via a seal (77).