公开(公告)号：WO2020011648A1

公开(公告)日：2020-01-16

申请号：PCT/EP2019/068015

申请日：2019-07-04

Applicant: ASML NETHERLANDS B.V.

Inventor： FANG, Wei ,  GUO, Zhaohui ,  ZHU, Ruoyu ,  LI, Chuan

IPC: G06T7/00

Abstract: A pattern grouping method may include receiving an image of a first pattern, generating a first fixed-dimensional feature vector using trained model parameters applying to the received image, and assigning the first fixed-dimensional feature vector a first bucket ID. The method may further include creating a new bucket ID for the first fixed-dimensional feature vector in response to determining that the first pattern does not belong to one of a plurality of buckets corresponding to defect patterns, or mapping the first fixed-dimensional feature vector to the first bucket ID in response to determining that the first pattern belongs to one of a plurality of buckets corresponding to defect patterns.