公开(公告)号：WO2006107961A3

公开(公告)日：2006-10-12

申请号：PCT/US2006/012491

申请日：2006-04-05

Applicant: BIOSCALE, INC. ,  MASTERS, Brett P. ,  MILLER, Michael F.

Inventor： MASTERS, Brett P. ,  MILLER, Michael F.

IPC: H03H3/00 ,  H03H3/04 ,  H03H3/10 ,  H03H9/02

Abstract: Electrically responsive devices and methods for fabricating electrically- responsive devices involves applying an electrically responsive material (e.g. piezoelectric material) (132) over at least a portion of a surface of a substrate material (104) and applying an electrode material (140) over at least a portion of a surface of the electrically responsive material. At least one region of the electrode material (140) is selectively removed exposing the electrically responsive material (244) . At least some of the electrically responsive material is selectively removed in a region corresponding to the at least one region of the electrode material.