公开(公告)号：WO2014031432A1

公开(公告)日：2014-02-27

申请号：PCT/US2013/055098

申请日：2013-08-15

Applicant: BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM

Inventor： ELLISON, Christopher J. ,  KATZENSTEIN, Joshua M. ,  JANES, Dustin W.

IPC: H01L21/027 ,  G03F7/26 ,  B44C1/22

CPC classification number: G03F7/26 ,  B29C59/02 ,  G03F7/0002 ,  G03F7/36 ,  G03F7/38 ,  Y10T428/24802

Abstract: Using a broadband light source and a photomask, surface energy gradients can be directly transferred into polymer films. The Marangoni effect causes high surface energy regions to rise upon heating the film. This leads to the formation of three-dimensional topography that can be locked in by quenching the polymer by cooling.

Abstract translation: 使用宽带光源和光掩模，表面能量梯度可以直接转移到聚合物膜中。 Marangoni效应导致加热膜时高表面能区域上升。 这导致三维形貌的形成，其可以通过冷却淬灭聚合物而被锁定。