公开(公告)号：WO2006096610A3

公开(公告)日：2007-12-27

申请号：PCT/US2006007859

申请日：2006-03-06

Applicant: BOC GROUP INC

Inventor： GERKEN DAVID ,  ROBERT BENJAMIN R

IPC: B67D7/72

CPC classification number: B67D7/0272 ,  Y10T137/3127

Abstract: An improved bulk fluid distribution system for controlling the pressure of a fluid in a supply line to a semiconductor manufacturing process. The distribution system includes a pump-based engine with either a pressure vessel or a pulse dampener. In the pump-pressure vessel embodiment, a controller monitors the pressure of the fluid in the supply line and adjusts the dispense pressure of the vessel. In the pump-pulse dampener embodiment, the controller monitors the pressure of the fluid in the supply line and adjusts the flow rate of the pump to maintain the pressure in the supply line at a predetermined setpoint.

Abstract translation: 一种改进的散装流体分配系统，用于控制供应管线中的流体对半导体制造过程的压力。 分配系统包括具有压力容器或脉冲阻尼器的基于泵的发动机。 在泵压力容器的实施例中，控制器监视供应管线中的流体的压力并调节容器的分配压力。 在泵脉冲阻尼器实施例中，控制器监测供应管线中的流体的压力，并且调整泵的流量以将供应管线中的压力保持在预定的设定点。

公开(公告)号：WO2006096646A2

公开(公告)日：2006-09-14

申请号：PCT/US2006007928

申请日：2006-03-06

Applicant: BOC GROUP INC

Inventor： GERKEN DAVID

IPC: B67D7/08 ,  B67D7/02 ,  B67D7/72

CPC classification number: F04F1/02 ,  B67D7/0272 ,  Y10T137/2569 ,  Y10T137/27 ,  Y10T137/3127

Abstract: An improved bulk fluid distribution for supplying process fluids to semiconductor process tools. The improved system having an alternating pressure vessel engine substantially eliminates pressure fluctuations in the bulk fluid supply line due to head losses from the changing weight of the fluid in the dispensing vessels. The system also enables flexible control of the flow conditions of the fluid in the fluid supply line.

Abstract translation: 用于向半导体加工工具提供工艺流体的改进的散装流体分布。 具有交替压力容器发动机的改进的系统基本上消除了散装流体供应管线中的压力波动，这是由于分配容器中流体的重量变化引起的头部损失。 该系统还能够灵活地控制流体供应管线中的流体的流动状态。