公开(公告)号：WO2016180609A1

公开(公告)日：2016-11-17

申请号：PCT/EP2016/058672

申请日：2016-04-19

Applicant: CARL ZEISS SMT GMBH

Inventor： SCHMEHL, Andreas

IPC: G03F7/20

CPC classification number: G03F7/70825 ,  C04B37/006 ,  C04B2237/12 ,  C04B2237/122 ,  C04B2237/123 ,  C04B2237/124 ,  C04B2237/125 ,  C04B2237/343 ,  C04B2237/365 ,  C04B2237/80

Abstract: The invention relates to a method for coating a surface (101) of an EUV submodule (120, 130) of ceramic material (100) that is intended for use in an EUV lithography system (500). Firstly, metallic solder (114) is applied to the surface (101) of the ceramic substrate (100) over its full surface area. Then a thermal treatment is performed for producing a material bond (116) between the ceramic material (100) and the metallic solder (114). The invention also relates to a method for producing an EUV module (200). For this purpose, at least two EUV submodules (120, 130) respectively coated over their full surface area by the method described above are joined by soldering or adhesive bonding. The invention relates furthermore to an EUV submodule (120, 130), to an EUV module (200) and to an EUV lithography system.

Abstract translation: 本发明涉及一种用于涂覆旨在用于EUV光刻系统（500）的陶瓷材料（100）的EUV子模块（120,130）的表面（101）的方法。 首先，将金属焊料（114）在其整个表面积上施加到陶瓷基板（100）的表面（101）上。 然后进行热处理，以在陶瓷材料（100）和金属焊料（114）之间产生材料结合（116）。 本发明还涉及一种用于制造EUV模块（200）的方法。 为此，通过上述方法分别涂覆在它们的整个表面积上的至少两个EUV子模块（120,130）通过焊接或粘合粘合来连接。 本发明还涉及EUV子模块（120,130），EUV模块（200）和EUV光刻系统。

公开(公告)号：WO2019219478A1

公开(公告)日：2019-11-21

申请号：PCT/EP2019/061814

申请日：2019-05-08

Applicant: CARL ZEISS SMT GMBH

Inventor： SCHMEHL, Andreas ,  SIEKMANN, Heiko

IPC: C30B11/00 ,  C30B11/02 ,  C30B11/14 ,  C30B29/06 ,  C30B29/08 ,  G02C7/00

Abstract: The invention relates to a method for producing a substrate (10) for an optical element (11), comprising: introducing a starting material, preferably a metal or a semimetal, into a container and melting the starting material, producing a material body having a quasi-monocrystalline volume region (8) by directionally solidifying the molten starting material proceeding from a plurality of monocrystalline seed plates arranged in the region of a base of the container, and producing the substrate (10) by processing the material body to form an optical surface (12). The invention also relates to a reflective optical element (11), in particular for reflecting EUV radiation (14), comprising: a substrate (10) having an optical surface (12), on which a reflective coating (13) is applied. The substrate (10) is typically produced in accordance with the method described above and has a quasi-monocrystalline volume region (8).