公开(公告)号：WO2016036422A1

公开(公告)日：2016-03-10

申请号：PCT/US2015/027201

申请日：2015-04-23

Applicant: CAVENDISH KINETICS, INC

Inventor： HUFFMAN, James Douglas ,  KHIEU, Cong Quoc ,  VAN KAMPEN, Robertus Petrus ,  SMAYLING, Karl, F. ,  JOSHI, Vikram

IPC: B81C99/00

CPC classification number: B81C99/003 ,  B81B2201/016 ,  B81B2207/015 ,  G01R27/2605 ,  H01G5/16 ,  H01L23/5228 ,  H01L29/93

Abstract: The present invention generally relates to a mechanism for testing a MEMS hysteresis. A power management circuit may be coupled to the electrodes that cause the movable plate that is disposed between the electrodes in a MEMS device to move. The power management circuit may utilize a charge pump, a comparator and a resistor ladder.

Abstract translation: 本发明一般涉及一种用于测试MEMS滞后的机构。 功率管理电路可以耦合到电极，其使得设置在MEMS器件中的电极之间的可移动板移动。 电源管理电路可以使用电荷泵，比较器和电阻梯。