公开(公告)号：WO2019190700A1

公开(公告)日：2019-10-03

申请号：PCT/US2019/020415

申请日：2019-03-01

Applicant: CYMER, LLC

Inventor： O'BRIEN, Kevin, Michael ,  DUFFEY, Thomas, Patrick ,  THORNES, Joshua, Jon

IPC: H01S3/10

Abstract: A method includes driving, while producing a burst of pulses at a pulse repetition rate, a spectral feature adjuster among a set of discrete states at a frequency correlated with the pulse repetition rate; and in between the production of the bursts of pulses (while no pulses are being produced), driving the spectral feature adjuster according to a driving signal defined by a set of parameters. Each discrete state corresponds to a discrete value of a spectral feature. The method includes ensuring that the spectral feature adjuster is in one of the discrete states that corresponds to a discrete value of the spectral feature of the amplified light beam when a pulse in the next burst is produced by adjusting one or more of: an instruction to the lithography exposure apparatus, the driving signal to the spectral feature adjuster, and/or the instruction to the optical source.

公开(公告)号：WO2017058531A1

公开(公告)日：2017-04-06

申请号：PCT/US2016/052001

申请日：2016-09-15

Applicant: CYMER, LLC

Inventor： LUO, Siqi ,  UJAZDOWSKI, Richard, Carl ,  DUFFEY, Thomas, Patrick ,  GILLESPIE, Walter, Dale

IPC: H01S3/032 ,  H01S3/038 ,  H01S3/0971

CPC classification number: H01S3/0385 ,  H01S3/0382 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/225

Abstract: Anodes and cathodes for use in generating gas discharge laser Sight are disclosed. The improved anode has a transition portion that includes a substantially vertical sidewall to transition between the active portion and the end portion to reduce erosion-related issues. The improved cathode has thickened spine portions in enhanced erosion locations. The spine portions are thickened by removing material from the shoulder of the cathode stepped cross-section profile in those locations in order to improve the longevity of the cathode.

Abstract translation: 公开了用于产生气体放电激光瞄准镜的阳极和阴极。 改进的阳极具有过渡部分，该过渡部分包括基本上垂直的侧壁，以在活性部分和端部部分之间转变，以减少侵蚀相关问题。 改进的阴极在增强的侵蚀位置中具有增厚的脊部。 为了改善阴极的使用寿命，在这些位置中，通过从阴极阶梯状截面轮廓的肩部除去材料来增加脊部。

公开(公告)号：WO2018044583A1

公开(公告)日：2018-03-08

申请号：PCT/US2017/047449

申请日：2017-08-17

Applicant: CYMER, LLC

Inventor： BIBBY, Thomas, Frederick, Allen ,  THORNES, Joshua, Jon ,  ROKITSKI, Rostislav ,  DUFFEY, Thomas, Patrick

IPC: G01J3/02 ,  G01J3/10 ,  G01J3/12 ,  H01S3/00

Abstract: Techniques for controlling an optical system include accessing a measured value of a property of a particular pulse of a pulsed light beam emitted from the optical system, the property being related to an amount of coherence of the light beam; comparing the measured value of the property of the light beam to a target value of the property; determining whether to generate a control signal based on the comparison; and if a control signal is generated based on the comparison, adjusting the amount of coherence in the light beam by modifying an aspect of the optical system based on the control signal to reduce an amount of coherence of a pulse that is subsequent to the particular pulse.

Abstract translation: 用于控制光学系统的技术包括访问从光学系统发射的脉冲光束的特定脉冲的特性的测量值，该特性与光束的相干量有关; 将光束性质的测量值与性质的目标值进行比较; 基于比较来确定是否产生控制信号; 并且如果基于该比较生成控制信号，则通过基于控制信号修改光学系统的方面来调整光束中的相干性量，以减小在特定脉冲之后的脉冲的相干性量 。

公开(公告)号：WO2021086640A1

公开(公告)日：2021-05-06

申请号：PCT/US2020/055987

申请日：2020-10-16

Applicant: CYMER, LLC

Inventor： BURDT, Russell, Allen ,  DUFFEY, Thomas, Patrick

IPC: G03F7/20

Abstract: A method of generating a test for a radiation source for a lithographic apparatus comprises a step of receiving data corresponding to a plurality of firing patterns of the radiation source. The method further comprises the step of analyzing the data to determine parameters for configuring one or more further firing patterns for testing the radiation source. The parameters are determined such that a stability of the radiation source when executing the one or more further firing patterns configured using the parameters is substantially the same as, or within predefined bounds relative to, a stability of the radiation source when executing the plurality of firing patterns. Furthermore, parameters are determined such that a total duration of the one or more further firing patterns when executed by the radiation source will be less than a duration of the plurality of firing patterns when executed by the radiation source.

公开(公告)号：WO2019083722A1

公开(公告)日：2019-05-02

申请号：PCT/US2018/055078

申请日：2018-10-09

Applicant: CYMER, LLC

Inventor： DUFFEY, Thomas, Patrick ,  MELCHER, Paul, Christopher ,  GILLESPIE, Walter, Dale

IPC: H01S3/225 ,  H01S3/09 ,  H01S3/097

Abstract: Disclosed are methods of and apparatus for extending a useful lifetime of a laser discharge chamber in which a polarity of an electrode positioned at a fixed position within the chamber is caused to be positive with respect to the polarity of a second electrode defining a discharge gap with the first electrode and the first electrode is made of a material that forms an erosion resistant surface when the first electrode is used and an anode. Also disclosed is an arrangement in which a first electrode is positionable with respect a second electrode defining a discharge gap with the second electrode and the position of the first electrode controlled to maintain the width of the gap within a predetermined range.