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公开(公告)号：WO2021058951A1
公开(公告)日：2021-04-01
申请号：PCT/GB2020/052303
申请日：2020-09-23
Applicant: EDWARDS LIMITED
Inventor： GRAHAM, Michael Colin , SEELEY, Andrew James , PRICE, Duncan Michael
IPC: B01D53/70
Abstract: A method of optimising operating conditions in an abatement apparatus configured to treat an effluent stream from a processing tool and an abatement apparatus are disclosed. The method of optimising operating conditions in an abatement apparatus configured to treat an effluent stream containing PFC from a processing tool comprise: changing an operating parameter which controls an operating condition of the abatement apparatus; determining a change in a PFC concentration present in an exhaust stream of the abatement apparatus; and determining whether to retain the operating parameter based on the change in the PFC concentration. In this way, the concentration of PFC present in the exhaust can be used to determine whether the abatement apparatus is operating under the correct operating conditions or not.
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公开(公告)号：WO2020249482A1
公开(公告)日：2020-12-17
申请号：PCT/EP2020/065647
申请日：2020-06-05
Applicant: EDWARDS LIMITED
Inventor： SEELEY, Andrew James , STONES, Ian David , PRICE, Duncan Michael
Abstract: An inlet assembly for an abatement apparatus and a method are disclosed. The inlet assembly is for an abatement apparatus and comprises: an inlet nozzle defining a non-circular inlet aperture coupleable with an inlet conduit providing an effluent gas stream for treatment by the an abatement apparatus, at least one outlet aperture and a nozzle bore extending along a longitudinal axis between the non-circular inlet aperture and the outlet aperture for conveying the effluent gas stream from the non-circular inlet aperture to the outlet aperture for delivery to a treatment chamber of the abatement apparatus, the nozzle bore defining an inlet portion extending from the non-circular inlet aperture, a flow-dividing structure positioned downstream of the inlet portion and configured to separate the effluent gas stream into at least a pair of effluent gas streams and an outlet portion extending to the outlet aperture and configured to convey the pair of effluent gas streams to the treatment chamber of the an abatement apparatus. In this way, multiple effluent gas streams are generated or produced by the inlet assembly which helps to improve the performance of the abatement apparatus, particularly at low flow rates.
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公开(公告)号：WO2017037419A1
公开(公告)日：2017-03-09
申请号：PCT/GB2016/052598
申请日：2016-08-22
Applicant: EDWARDS LIMITED
Inventor： PRICE, Duncan Michael , KNIGHT, Gary Peter
CPC classification number: B01D53/005 , B01D2257/2066 , B01D2259/80 , F23D14/16 , F23G5/10 , F23G7/063
Abstract: An abatement apparatus and method are disclosed. The abatement apparatus is for treating an effluent gas stream from a manufacturing processing tool and comprises: a porous element at least partially defining a treatment chamber and through which treatment materials pass for introduction into the treatment chamber for treatment of the effluent gas stream; and an infra-red heating device operable to emit infra-red energy to heat the porous element which heats the treatment materials as they pass through the porous element into the treatment chamber. In this way, infra-red energy, rather than combustion, can be used to raise the temperature within the treatment chamber in order to treat the effluent gas stream. This provides for greater flexibility in the use of such apparatus since the apparatus can be used in environments where no fuel gas exists or where the provision of fuel gas is considered undesirable. Also, heating the treatment materials as they pass through the porous sleeve, rather than simply using radiant heat to heat the treatment chamber enables significantly more energy to be imparted into the treatment materials as they transit through the porous sleeve.
Abstract translation: 公开了减排装置和方法。 减排装置用于处理来自制造加工工具的废气流，包括：至少部分地限定处理室的多孔元件，并且处理材料通过该多孔元件引入处理室中以处理流出气流; 以及红外加热装置，其可操作地发射红外能量以加热多孔元件，所述多孔元件在处理材料通过多孔元件进入处理室时将其加热。 以这种方式，可以使用红外能量而不是燃烧，以提高处理室内的温度，以便处理废气流。 这提供了在使用这种装置时更大的灵活性，因为该装置可以用于不存在燃料气体的环境或者认为提供燃料气体是不期望的。 此外，当处理材料通过多孔套筒而不是简单地使用辐射热来加热处理室时，加热处理材料使得能够在处理材料通过多孔套管时显着地赋予处理材料更多的能量。
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公开(公告)号：WO2019220087A1
公开(公告)日：2019-11-21
申请号：PCT/GB2019/051305
申请日：2019-05-13
Applicant: EDWARDS LIMITED
Inventor： SEELEY, Andrew James , KNIGHT, Gary Peter , PRICE, Duncan Michael , VERMA, Mayank
Abstract: A method for fabricating a component of an abatement apparatus is disclosed. The method comprises: meshing a 3D model representation of a component defining a reaction chamber of an abatement apparatus based on specified component characteristics to define an optimised finite element representation of the component; and fabricating the optimised finite element representation. In this way, a 3D model of a component of an abatement apparatus can be generated from which its performance can be modelled. Particular characteristics of the component may be defined which affect the operation of the abatement apparatus. Those characteristics may then be used to generate the optimized finite element representation of the component which has those characteristics using meshing (it will be appreciated that meshing is the operation of representing a geometric object as a set of finite elements). The optimized finite element representation may then fabricated, reliably producing a component having the required characteristics.
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公开(公告)号：WO2018178636A1
公开(公告)日：2018-10-04
申请号：PCT/GB2018/050744
申请日：2018-03-21
Applicant: EDWARDS LIMITED
Inventor： SEELEY, Andrew , PRICE, Duncan Michael
Abstract: A nozzle for an abatement apparatus and a method are disclosed. The nozzle is for abatement apparatus operable to treat an effluent stream from a processing tool, the nozzle comprises: a nozzle body defining a nozzle inlet operable to receive the effluent stream, a nozzle outlet, and a conduit extending between the nozzle inlet and the nozzle outlet and operable to convey the effluent stream in a direction of flow from the nozzle inlet to the nozzle outlet; and an effluent stream rotator configured to impart a rotational component to the effluent stream to rotate the effluent stream around the direction of flow. In this way, the effluent stream is rotated as it passes through the nozzle body. The destruction rate efficiency achieved by an abatement apparatus when receiving such rotating effluent streams has been found to be significantly improved compared to non-rotating effluent streams.
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Patent Agency Ranking
公开(公告)号：WO2016097697A1
公开(公告)日：2016-06-23
申请号：PCT/GB2015/053781
申请日：2015-12-10
Applicant: EDWARDS LIMITED
Inventor： SEELEY, Andrew James , PRICE, Duncan Michael
CPC classification number: F23G7/065 , F23D14/12 , F23D14/583 , F23D14/70 , F23D2205/00 , F23G2209/142
Abstract: An inlet assembly (50) for a burner and a method are disclosed. The inlet assembly (50) comprises: an inlet nozzle defining an inlet aperture (240) coupleable with an inlet conduit providing an effluent gas stream for treatment by the burner, a non-circular outlet aperture (260), and a nozzle bore extending along a longitudinal axis between the inlet aperture (240) and the outlet aperture (260) for conveying the effluent gas stream from the inlet aperture (240) to the outlet aperture (260) for delivery to the combustion chamber of the burner, the nozzle bore having an inlet portion (200) extending from the inlet aperture (240), an outlet portion (220) extending to the non- circular outlet aperture (260), and a baffle portion (210) with a reduced baffle aperture (270) in-between. In this way, the non-circular outlet aperture (260) provides a non-circular effluent gas stream flow into the combustion chamber. The non-circular effluent gas flow enables a greater volume of effluent gas stream to be introduced into the combustion chamber whilst still achieving or exceeding the required levels of abatement. This is because a non-circular effluent gas stream provides a reduced distance along which diffusion and reaction needs to occur compared to that of an equivalent circular effluent gas stream. Hence, an increased volume of effluent gas stream can be abated, compared to that of an equivalent circular effluent gas stream.
Abstract translation: 公开了一种用于燃烧器的入口组件（50）和方法。 入口组件（50）包括：入口喷嘴，其限定入口孔（240），入口孔与入口导管连接，所述入口导管提供用于由燃烧器处理的流出气流，非圆形出口孔（260）和沿着 在入口孔（240）和出口孔（260）之间的纵向轴线，用于将排出气体流从入口孔（240）传送到出口孔（260），用于输送到燃烧器的燃烧室，喷嘴孔 具有从入口孔（240）延伸的入口部分（200），延伸到非圆形出口孔（260）的出口部分（220）和具有减少的挡板孔（270）的挡板部分（210） -之间。 以这种方式，非圆形出口孔（260）提供了一个非循环流出气流进入燃烧室。 非循环流出气流使得能够将更大体积的废气流引入燃烧室，同时仍达到或超过所需的减排水平。 这是因为与循环流出物气流相比，非循环流出气流提供了减少的扩散和反应的距离。 因此，与等效的循环废气流相比，可以减少流出物流量的增加。
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公开(公告)号：WO2021105660A1
公开(公告)日：2021-06-03
申请号：PCT/GB2020/052987
申请日：2020-11-24
Applicant: EDWARDS LIMITED
Inventor： SEELEY, Andrew James , PRICE, Duncan Michael
Abstract: A method of fabricating a burner element for an abatement apparatus is disclosed. The method comprises: injection moulding a charge comprising metal particles and a flow compound into a mould defining the burner element to produce a moulded burner element; and sintering the moulded burner element. In this way, injection moulding is used to produce the burner element, which provides far more flexibility regarding the design and properties of the burner element and avoids the necessity of incorporating a perforated support into the burner element. This allows burner elements of more intricate design to be produced, as well as burner elements which are thinner than those produced using existing techniques, which increases the volume of a combustion chamber defined by that burner element for any external burner element size, which in turn increases the amount of effluent gas that can be treated for any burner size.
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公开(公告)号：WO2021089993A1
公开(公告)日：2021-05-14
申请号：PCT/GB2020/052779
申请日：2020-11-03
Applicant: EDWARDS LIMITED
Inventor： PRICE, Duncan Michael , GRAHAM, Michael Colin
Abstract: A method of optimising operating conditions in an abatement apparatus configured to treat an effluent stream from a processing tool and an abatement apparatus are disclosed. The method of optimising operating conditions in an abatement apparatus configured to treat an effluent stream from a processing tool comprises: determining a concentration of carbon monoxide produced by the abatement apparatus when treating the effluent stream; and adjusting an operating parameter of the abatement apparatus in response to the concentration of carbon monoxide. In this way, the performance of the abatement device can be controlled by simply adjusting the operating parameters of the abatement device in response to the amount of carbon monoxide being produced to create conditions within the abatement apparatus which improve the removal of compounds being treated within the abatement device, while reducing undesirable by-products and without requiring advanced knowledge of the content of the effluent stream.
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公开(公告)号：WO2018185469A1
公开(公告)日：2018-10-11
申请号：PCT/GB2018/050844
申请日：2018-03-28
Applicant: EDWARDS LIMITED
Inventor： SEELEY, Andrew , PRICE, Duncan Michael
Abstract: A purge gas feeding means, an abatement system comprising such a means and a method of modifying an abatement system to include such a purge gas feeding means is disclosed. The purge gas feeding means comprises a plurality of paths running from an outer perimeter of the purge gas feeding means to an inner surface, the inner surface comprising a purge gas outlet for outputting the purge gas into the abatement system; wherein a cross sectional area of the plurality of paths increases from the outer perimeter to the inner surface such that a pressure of the purge gas falls flowing along the paths drops.
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10.发明申请APPARATUS FOR EVACUATING A CORROSIVE EFFLUENT GAS STREAM FROM A PROCESSING CHAMBER 审中-公开从加工室中排出腐蚀性气体流的装置
公开(公告)号：WO2017013383A1
公开(公告)日：2017-01-26
申请号：PCT/GB2016/051764
申请日：2016-06-15
Applicant: EDWARDS LIMITED
Inventor： BAILEY, Christopher Mark , TUNNA, Clive Marcus Lloyd , TATTERSALL, Jack Raymond , GRAHAM, Ingo Stephen , CZERNIAK, Michael Roger , KNIGHT, Gary Peter , MENNIE, Darren , PRICE, Duncan Michael , BAKER, Derek Martin , SEELEY, Andrew James
CPC classification number: B01D53/68 , B01D53/75 , B01D2252/103 , B01D2257/204 , B01D2257/206 , B01D2258/0216 , C23C16/4412 , F04C19/001 , Y02C20/30
Abstract: Dry pumps are used to pump a variety of gas mixtures from the semiconductor industry. The present invention provides a liquid ring pump located between the dry pump and an abatement device to remove soluble corrosive materials prior to the exhaust gases entry to the abatement device, the work fluid exhausted from the liquid ring pump being separated from the gas prior to entry to the abatement device.
Abstract translation: 干泵用于泵送来自半导体工业的各种气体混合物。 本发明提供了一种位于干泵和减排装置之间的液环泵，用于在废气进入减排装置之前除去可溶性腐蚀性材料，从液环泵排出的工作流体在进入之前与气体分离 到减排装置
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