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公开(公告)号：WO2023285782A1
公开(公告)日：2023-01-19
申请号：PCT/GB2022/051748
申请日：2022-07-07
Applicant: EDWARDS LIMITED
Inventor： SEELEY, Andrew James , SILBERSTEIN, Michael Jay
Abstract: An inlet assembly, an abatement apparatus and a method are disclosed. The inlet assembly is for an abatement apparatus for treating an effluent stream from a semiconductor processing tool, the inlet assembly comprises: an inlet nozzle configured to deliver the effluent stream into a combustion chamber of the abatement apparatus; and a reagent nozzle configured to deliver a reagent into the combustion chamber of the abatement apparatus, the reagent nozzle being located concentrically with respect to the inlet nozzle, the reagent nozzle being configured to deliver the reagent in different quantities at different positions around its perimeter. In this way, the amount of reagent supplied to the combustion chamber to assist in the abatement of the effluent stream can be varied at different positions or locations around the effluent stream. This enables the flow of the reagent to be matched the flow of the effluent stream discharging from the inlet nozzle into the combustion chamber which provides the correct amount of reagent to suit the effluent stream at different locations which improves the destruction rate efficiency of the abatement apparatus without causing an oversupply of reagent.
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公开(公告)号：WO2023285778A1
公开(公告)日：2023-01-19
申请号：PCT/GB2022/051744
申请日：2022-07-07
Applicant: EDWARDS LIMITED
Abstract: An abatement apparatus and a method are disclosed. The abatement apparatus is for abatement of an effluent stream from a semiconductor processing tool and comprises: a combustion chamber formed by a foraminous sleeve defining an upstream portion of the combustion chamber for treating the effluent stream, the upstream portion of the combustion chamber having an inlet for receiving the effluent stream and a wetted sleeve fluidly coupled with foraminous sleeve, the wetted sleeve defining a downstream portion of the combustion chamber, wherein the foraminous sleeve is configured to provide a foraminous axial surface facing downstream towards the downstream portion of the combustion chamber. In this way, the foraminous surface not only faces inwards towards the upstream portion of the combustion chamber, but also faces downstream, towards the downstream portion of the combustion chamber. This facilitates combustion on the surface of the foraminous sleeve, both towards the upstream portion of the combustion chamber and towards the downstream portion of the combustion chamber. This helps to maintain the temperature in the vicinity of the discharge region of the foraminous sleeve, which helps to prevent condensation of particulate matter occurring in this region and helps to prevent the build-up of particulates, powder or condensates that may cause bridging or blockages.
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公开(公告)号：WO2023285779A1
公开(公告)日：2023-01-19
申请号：PCT/GB2022/051745
申请日：2022-07-07
Applicant: EDWARDS LIMITED
Abstract: A modular abatement apparatus and a method are disclosed. The modular abatement apparatus is for abatement of an effluent stream from a semiconductor processing tool and comprises: a housing defining a common housing chamber; a plurality of combustion chamber modules positionable within the common housing chamber for treating the effluent stream, each combustion chamber module containing a foram incus sleeve defining a combustion chamber therewithin. In this way, multiple combustion chambers may be provided within a single, common housing, each of which may be configured to treat a particular effluent stream flow. Accordingly, the number of combustion chambers can be selected to match the different types and flowrates of the effluent stream expected from any particular processing tool. This provides an architecture which is readily scalable to suit the needs of different effluent gas stream types and flowrates while retaining a common housing which may interface with upstream and downstream components.
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