公开(公告)号：WO2012066489A4

公开(公告)日：2012-08-30

申请号：PCT/IB2011055133

申请日：2011-11-16

Applicant: EULITHA A G ,  SOLAK HARUN H ,  CLUBE FRANCIS

Inventor： SOLAK HARUN H ,  CLUBE FRANCIS

IPC: G03F7/20

CPC classification number: G03F7/70058 ,  G03F1/28 ,  G03F7/70408

Abstract: A method for printing a periodic pattern having a first symmetry and a first period into a photosensitive layer that includes providing a mask bearing a pattern of at least two overlapping sub-patterns which have a second symmetry and a second period, the features of each sub-pattern being formed in a transmissive material, providing a substrate bearing the layer, arranging the mask with a separation from the substrate, providing light having a central wavelength for illuminating the mask to generate a light-field in which light of the central wavelength forms a range of intensity distributions between Talbot planes, illuminating said mask pattern with said light whilst maintaining the separation or changing it by a distance whereby the photosensitive layer is exposed to an average of the range of intensity distributions, wherein the light transmitted by each sub-pattern is shifted in phase relative to that transmitted by another sub-pattern.

Abstract translation: 一种用于将具有第一对称性和第一周期的周期性图案印刷到感光层中的方法，所述感光层包括提供具有至少两个具有第二对称性和第二周期的重叠子图案的图案的掩模，每个子层的特征 图案形成在透射材料中，提供承载该层的衬底，将衬底与衬底分离布置，提供具有用于照亮掩模的中心波长的光以产生中心波长的光形成的光场 在Talbot平面之间的一系列强度分布，用所述光照亮所述掩模图案，同时保持分离或将其改变一定距离，由此感光层暴露于强度分布范围内的平均值， 图案相对于由另一子图案传输的图案相位移动。

公开(公告)号：WO2012066489A3

公开(公告)日：2012-07-12

申请号：PCT/IB2011055133

申请日：2011-11-16

Applicant: EULITHA A G ,  SOLAK HARUN H ,  CLUBE FRANCIS

Inventor： SOLAK HARUN H ,  CLUBE FRANCIS

IPC: G03F7/20

CPC classification number: G03F7/70058 ,  G03F1/28 ,  G03F7/70408

Abstract: A method for printing a periodic pattern having a first symmetry and a first period into a photosensitive layer that includes providing a mask bearing a pattern of at least two overlapping sub-patterns which have a second symmetry and a second period, the features of each sub-pattern being formed in a transmissive material, providing a substrate bearing the layer, arranging the mask with a separation from the substrate, providing light having a central wavelength for illuminating the mask to generate a light-field in which light of the central wavelength forms a range of intensity distributions between Talbot planes, illuminating said mask pattern with said light whilst maintaining the separation or changing it by a distance whereby the photosensitive layer is exposed to an average of the range of intensity distributions, wherein the light transmitted by each sub-pattern is shifted in phase relative to that transmitted by another sub-pattern.

Abstract translation: 一种用于将具有第一对称性和第一周期的周期性图案印刷到光敏层中的方法，该方法包括提供承载具有第二对称性和第二周期的至少两个重叠子图案的图案的掩模，每个子图案的特征 - 图案形成为透射材料，提供承载该层的基底，将掩模与基底分离设置，提供具有中心波长的光以照射掩模以产生光场，其中中心波长的光形成 Talbot平面之间的强度分布范围，用所述光照射所述掩模图案，同时保持分离或将其改变一定距离，由此感光层暴露于强度分布范围的平均值，其中， 模式相对于由另一个子模式传输的模式相移。

公开(公告)号：WO2012164539A4

公开(公告)日：2013-01-24

申请号：PCT/IB2012052778

申请日：2012-06-01

Applicant: EULITHA A G ,  SOLAK HARUN ,  CLUBE FRANCIS ,  DAIS CHRISTIAN

Inventor： SOLAK HARUN ,  CLUBE FRANCIS ,  DAIS CHRISTIAN

IPC: G03F7/20

CPC classification number: G03F7/70075 ,  G03F7/70408

Abstract: A method for printing a periodic pattern (19) of features into a photosensitive layer (21), which method includes providing a mask (18) bearing a mask pattern, providing a substrate (20) bearing the layer, arranging the substrate parallel to the mask, providing a number of lasers (1) having a plurality of peak wavelengths, forming from said light a beam for illuminating the mask with a spectral distribution of exposure dose and a degree of collimation, illuminating the mask with said beam such that the light of each wavelength transmitted by the mask pattern forms a range of transversal intensity distributions between Talbot planes and exposes the photosensitive layer to an image component, wherein the separation and spectral distribution are arranged so that the superposition of said components is equivalent to an average of the range of transversal intensity distributions formed by light of one wavelength and the collimation is arranged so that the features are resolved.

Abstract translation: 一种用于将特征的周期性图案（19）印刷到感光层（21）中的方法，该方法包括提供具有掩模图案的掩模（18），提供承载该层的基底（20），将基底平行于 掩模，提供多个具有多个峰值波长的激光器（1），从所述光线形成用于以曝光剂量的光谱分布和准直程度照射所述掩模的光束，用所述光束照射所述掩模，使得所述光 由掩模图案传输的每个波长形成Talbot平面之间的横向强度分布范围，并将感光层暴露于图像分量，其中分离和光谱分布被布置成使得所述组件的叠加等价于 布置由一个波长的光和准直形成的横向强度分布的范围，使得特征被解决。

公开(公告)号：WO2014147562A2

公开(公告)日：2014-09-25

申请号：PCT/IB2014059949

申请日：2014-03-18

Applicant: EULITHA A G ,  CLUBE FRANCIS ,  SOLAK HARUN ,  DAIS CHRISTIAN

Inventor： CLUBE FRANCIS ,  SOLAK HARUN ,  DAIS CHRISTIAN

IPC: G03F7/20

CPC classification number: G03F7/70191 ,  G03F7/7035 ,  G03F7/70408

Abstract: A method for printing a periodic pattern of features into a photosensitive layer, which includes providing a mask bearing a periodic pattern, providing a substrate bearing the photosensitive layer, arranging the substrate substantially parallel to the mask, forming a beam of collimated monochromatic light for illuminating said mask pattern so that the light-field transmitted by the mask forms Talbot image planes separated by a Talbot distance, and performing N sub- exposures of the mask with said beam and changing the separation between sub-exposures so that the relative separation during the ith sub-exposure with respect to that during the first sub-exposure is given by (mi + ni/N) times the Talbot distance, and exposing the mask pattern to the same energy density of illumination for each sub-exposure, wherein the period is selected in relation to the wavelength so that only the zeroth and first diffraction orders are transmitted by the mask.

Abstract translation: 一种用于将特征周期性图案印刷到感光层中的方法，其包括提供带有周期性图案的掩模，提供承载感光层的基底，将基底基本上平行于掩模布置，形成准直的单色光束用于照明 所述掩模图案使得由掩模发射的光场形成由Talbot距离分开的Talbot图像平面，并且利用所述光束执行掩模的N个次曝光并且改变次曝光之间的间隔，使得在 相对于第一次曝光期间的次曝光由（mi + ni / N）倍的Talbot距离给出，并且将掩模图案暴露于相同的每次次曝光的照明能量密度，其中周期 相对于波长选择，使得仅通过掩模传输第零和第一衍射级。

公开(公告)号：WO2012095795A2

公开(公告)日：2012-07-19

申请号：PCT/IB2012050128

申请日：2012-01-10

Applicant: EULITHA A G ,  CLUBE FRANCIS ,  SOLAK HARUN

Inventor： CLUBE FRANCIS ,  SOLAK HARUN

IPC: G03F7/20

CPC classification number: G03F7/70091 ,  G03F7/7035 ,  G03F7/70408

Abstract: A method for printing a desired periodic pattern, which includes providing a mask bearing a pattern of features having a period, providing a substrate bearing a photosensitive layer, arranging the substrate with a separation from the mask, generating collimated light with a wavelength and an intensity, at least the former of which may be temporally varied to deliver a spectral distribution of energy density, illuminating the mask pattern with said light whilst varying at least its wavelength so as to deliver a spectral distribution of energy density, such that the light-field transmitted by the mask is instantaneously composed of a range of transversal intensity distributions between Talbot planes, and whereby the layer is exposed to a time-integrated intensity distribution that prints the desired pattern, wherein the separation, spectral distribution and period are arranged so that the time-integrated intensity distribution corresponds to an average of the range of transversal intensity distributions.

Abstract translation: 一种用于印刷期望的周期性图案的方法，其包括提供带有具有周期的特征图案的掩模，提供带有感光层的基底，将衬底与掩模分离，产生具有波长和强度的准直光 至少其前者可以在时间上变化以递送能量密度的光谱分布，用所述光照亮掩模图案，同时至少改变其波长，以便传递能量密度的光谱分布，使得光场 由掩模发射的瞬时由Talbot平面之间的横向强度分布范围构成，并且由此该层暴露于打印期望图案的时间积分强度分布，其中分离，光谱分布和周期被布置成使得 时间积分强度分布对应于横向强度范围的平均值 ty分布。