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公开(公告)号：WO2022254431A1
公开(公告)日：2022-12-08
申请号：PCT/IL2022/050576
申请日：2022-05-30
Applicant: EZMEMS LTD.
Inventor： MOLINAZZI, Nicola , SHMILOVICH, Tsvi , KANTOR, Mark
Abstract: A sensor device comprising at least one sensor element and a sealed fluid cell having a compensation portion and a measurement portion coupled to the at least one sensor element. The sensor device is configured such that the compensation and measurement portions deform in response to externally applied fluid pressure to thereby change internal pressure conditions inside the sealed fluid cell and cause the measurement portion to experience differential pressure conditions of corresponding to the external and internal pressures.
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