公开(公告)号：WO2023275737A1

公开(公告)日：2023-01-05

申请号：PCT/IB2022/055986

申请日：2022-06-28

Applicant: FONDAZIONE ISTITUTO ITALIANO DI TECNOLOGIA

Inventor： PISANELLO, Ferruccio ,  DE VITTORIO, Massimo ,  PISANELLO, Marco ,  BALENA, Antonio ,  SPAGNOLO, Barbara ,  PISANO, Filippo ,  BIANCO, Marco ,  SILEO, Leonardo

IPC: A61B5/00 ,  A61B2562/0233 ,  A61B2562/028 ,  A61B2562/12 ,  A61B2562/125 ,  A61B5/0084 ,  A61B5/293 ,  A61B5/6868 ,  C03C25/1068

Abstract: Method for manufacturing a multifunctional electromagnetic waveguide (10), comprising: mounting an optical fiber (1) on a roto-translational handling apparatus (RT), forming a first mask (41) on a tapered section of the fiber in order to define the shape of an optical window (12), forming a first metal layer (42) around the tapered section (13), leaving a lateral edge of the first mask (41) uncovered, removing the first mask (41) by chemical etching in order to uncover the optical window (12), depositing a first transparent layer (43) around the tapered section (13), depositing a second metal layer (44) around the insulating layer (43), forming a second mask (51) which defines the shape of a conductive track (11; 11a, lib, 11c), removing the second metal layer (44) by chemical etching, and removing the second mask (51) by chemical etching in order to uncover the conductive track.