公开(公告)号：WO2019143773A1

公开(公告)日：2019-07-25

申请号：PCT/US2019/013940

申请日：2019-01-17

Applicant: FORMFACTOR BEAVERTON, INC.

Inventor： FRANKEL, Joseph, George ,  DUCKWORTH, Koby, L. ,  NEGISHI, Kazuki

IPC: G01R1/067 ,  A61B34/20 ,  G01R31/28 ,  G02B5/12

Abstract: Probes with fiducial targets, probe systems including the same, and associated methods. The probes include a probe body, a probe beam, a probe tip configured to contact a device under test (DUT), and a fiducial target affixed to the probe beam. The fiducial target is configured to be visible to an optical system to determine a position of the probe tip relative to the DUT. The methods include methods of utilizing and/or manufacturing the probes.