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公开(公告)号：WO2019070518A1
公开(公告)日：2019-04-11
申请号：PCT/US2018/053331
申请日：2018-09-28
Applicant: FORMFACTOR BEAVERTON, INC.
Inventor： STORM, Christopher , SIMMONS, Michael, E. , BOLT, Bryan, Conrad , FISHER, Gavin, Neil , LORD, Anthony , NEGISHI, Kazuki
Abstract: Probe systems for testing a device under test are disclosed herein. The probe systems include a platen that defines an upper surface, an opposed lower surface, and a platen aperture. The probe systems also include a chuck that defines a support surface configured to support a device under test. The probe systems further include a lower enclosure extending from the lower surface of the platen and an upper enclosure extending from the upper surface of the platen. The upper enclosure includes a side wall that defines a side wall aperture, and the side wall and the platen define an intersection angle of at least 30 degrees and at most 60 degrees. The probe systems also include a manipulator, a probe shaft arm, a probe assembly, a test head, and an electrical conductor.
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Patent Agency Ranking2.发明申请
公开(公告)号：WO2021067084A1
公开(公告)日：2021-04-08
申请号：PCT/US2020/052127
申请日：2020-09-23
Applicant: FORMFACTOR BEAVERTON, INC.
Inventor： FRANKEL, Joseph, George , NEGISHI, Kazuki
Abstract: Probe systems and methods of characterizing optical coupling between an optical probe of a probe system and a calibration structure. The probe systems include a probe assembly that includes an optical probe, a support surface configured to support a substrate, and a signal generation and analysis assembly configured to generate an optical signal and to provide the optical signal to the optical device via the optical probe. The probe systems also include an electrically actuated positioning assembly, a calibration structure configured to receive the optical signal, and an optical detector configured to detect a signal intensity of the optical signal. The probe systems further include a controller programmed to control the probe system to generate a representation of signal intensity as a function of the relative orientation between the optical probe and the calibration structure. The methods include methods of operating the probe systems.
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3.发明申请
公开(公告)号：WO2021067049A1
公开(公告)日：2021-04-08
申请号：PCT/US2020/051420
申请日：2020-09-18
Applicant: FORMFACTOR BEAVERTON, INC.
Inventor： FRANKEL, Joseph, George , NEGISHI, Kazuki , SIMMONS, Michael, E. , CHRISTENSON, Eric, Robert , RISHAVY, Daniel
Abstract: Probe systems for optically probing a device under test (DUT) and methods of operating the probe systems. The probe systems include a probing assembly that includes an optical probe that defines a probe tip and a distance sensor. The probe systems also include a support surface configured to support a substrate, which defines a substrate surface and includes an optical device positioned below the substrate surface. The probe systems further include a positioning assembly configured to selectively regulate a relative orientation between the probing assembly and the DUT. The probe systems also include a controller programmed to control the operation of the probe systems. The methods include methods of operating the probe systems.
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公开(公告)号：WO2020247239A1
公开(公告)日：2020-12-10
申请号：PCT/US2020/034933
申请日：2020-05-28
Applicant: FORMFACTOR BEAVERTON, INC.
Inventor： NEGISHI, Kazuki , SIMMONS, Michael, E. , STORM, Christopher, Anthony , FRANKEL, Joseph, George , CHRISTENSON, Eric, Robert , BERG, Mario, Rene
Abstract: Calibration chucks for optical probe systems, optical probe systems including the calibration chucks, and methods of utilizing the optical probe systems. The calibration chucks include a calibration chuck body that defines a calibration chuck support surface. The calibration chucks also include at least one optical calibration structure that is supported by the calibration chuck body. The at least one optical calibration structure includes a horizontal viewing structure. The horizontal viewing structure is configured to facilitate viewing of a horizontally viewed region from a horizontal viewing direction that is at least substantially parallel to the calibration chuck support surface. The horizontal viewing structure also is configured to facilitate viewing of the horizontally viewed region via an imaging device of the optical probe system that is positioned vertically above the calibration chuck support surface.
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公开(公告)号：WO2020146175A1
公开(公告)日：2020-07-16
申请号：PCT/US2019/069084
申请日：2019-12-31
Applicant: FORMFACTOR BEAVERTON, INC.
Inventor： NEGISHI, Kazuki , FRANKEL, Joseph George , CHRISTENSON, Eric Robert
Abstract: Probe systems and methods for calibrating capacitive height sensing measurements. A probe system includes a probe assembly with a probe support body that supports a capacitive displacement sensor that terminates in a sensing tip relative to a substrate and that is configured to generate an uncalibrated capacitive height measurement. A method of utilizing the probe system to generate a calibrated capacitive height measurement includes receiving a height calibration structure architecture; calculating a layer impedance magnitude of each substrate layer of the height calibration structure; and calculating a total layer impedance magnitude of the height calibration structure. The method further includes measuring a measured impedance magnitude and calculating the calibrated capacitive height measurement.
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6.发明申请
公开(公告)号：WO2019143773A1
公开(公告)日：2019-07-25
申请号：PCT/US2019/013940
申请日：2019-01-17
Applicant: FORMFACTOR BEAVERTON, INC.
Inventor： FRANKEL, Joseph, George , DUCKWORTH, Koby, L. , NEGISHI, Kazuki
Abstract: Probes with fiducial targets, probe systems including the same, and associated methods. The probes include a probe body, a probe beam, a probe tip configured to contact a device under test (DUT), and a fiducial target affixed to the probe beam. The fiducial target is configured to be visible to an optical system to determine a position of the probe tip relative to the DUT. The methods include methods of utilizing and/or manufacturing the probes.
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