公开(公告)号：WO2020247239A1

公开(公告)日：2020-12-10

申请号：PCT/US2020/034933

申请日：2020-05-28

Applicant: FORMFACTOR BEAVERTON, INC.

Inventor： NEGISHI, Kazuki ,  SIMMONS, Michael, E. ,  STORM, Christopher, Anthony ,  FRANKEL, Joseph, George ,  CHRISTENSON, Eric, Robert ,  BERG, Mario, Rene

IPC: G01B7/00 ,  G01B7/14 ,  G01R1/067 ,  H01L21/66 ,  H01L21/67

Abstract: Calibration chucks for optical probe systems, optical probe systems including the calibration chucks, and methods of utilizing the optical probe systems. The calibration chucks include a calibration chuck body that defines a calibration chuck support surface. The calibration chucks also include at least one optical calibration structure that is supported by the calibration chuck body. The at least one optical calibration structure includes a horizontal viewing structure. The horizontal viewing structure is configured to facilitate viewing of a horizontally viewed region from a horizontal viewing direction that is at least substantially parallel to the calibration chuck support surface. The horizontal viewing structure also is configured to facilitate viewing of the horizontally viewed region via an imaging device of the optical probe system that is positioned vertically above the calibration chuck support surface.