公开(公告)号：WO2005071715A3

公开(公告)日：2005-09-22

申请号：PCT/US2004042270

申请日：2004-12-15

Applicant: HONEYWELL INT INC ,  BARETT COLE E ,  HIGASHI ROBERT E

Inventor： BARETT COLE E ,  HIGASHI ROBERT E

IPC: C01B31/02 ,  C30B29/60 ,  H01L21/00

CPC classification number: C30B29/605 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/162 ,  Y10S977/742 ,  Y10T428/30

Abstract: A structure having a substrate, patterned metal layer and a catalyst island formed on the metal layer. The surface of the substrate upon which the metal layer is formed may be oxidized. As an illustrative example, the metal may be HfN and the catalyst island may be iron, nickel, or the like. The resulting structure may be placed in an environment having a carbon-containing gas, a temperature between 500 and 1200 degrees C, and an electric field. A nanotube may grow from the catalyst island. A method including the combining of hafnium and nitrogen may be used to make the nanotube growing structure.

Abstract translation: 具有形成在金属层上的基板，图案化金属层和催化剂岛的结构。 形成有金属层的基板的表面可能被氧化。 作为说明性实例，金属可以是HfN，催化剂岛可以是铁，镍等。 所得结构可以放置在具有含碳气体，温度在500至1200℃之间的电场和电场中。 纳米管可以从催化剂岛生长。 可以使用包括铪和氮的组合的方法来制造纳米管生长结构。