公开(公告)号：WO1989011120A1

公开(公告)日：1989-11-16

申请号：PCT/US1989001389

申请日：1989-04-05

Applicant: HUGHES AIRCRAFT COMPANY

Inventor： HUGHES AIRCRAFT COMPANY ,  GABALDON, John, B.

IPC: G05B19/39

CPC classification number: H01L24/78 ,  B23K20/106 ,  G05B19/235 ,  G05B2219/45033 ,  G05B2219/49362 ,  H01L2224/78 ,  H01L2224/78301 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01019 ,  H01L2924/01033 ,  H01L2924/01039 ,  H01L2924/12041 ,  H01L2924/14 ,  H01L2224/48 ,  H01L2224/45099 ,  H01L2224/05599 ,  H01L2924/00

Abstract: An automatic ultrasonic wire bonder employs a compliant motion servo (17, 119, 238, 200) on its Z axis drive to maintain a known, constant and steady force applied by the bonding tool (13) to the wire. The tool is resiliently mounted to a carriage (15) that is driven by a force control servo (17, 119, 238, 200). During bonding, the tool is pressed against the wire, and effects of variations in tool tip Z axis position caused by vibration, wire deformation during bonding and other factors of the equipment are minimized by a servo that precisely controls and maintains a fixed position of the carriage relative to the wire to thereby maintain a preselected force between the bonding tool tip and the wire.