公开(公告)号：WO02095308A3

公开(公告)日：2003-03-06

申请号：PCT/US0205801

申请日：2002-02-25

Applicant: IGC POLYCOLD SYSTEMS INC ,  APPARAO TAMIRISA V V R ,  PODTCHERNIAEV OLEG ,  FLYNN KEVIN P ,  HALL PAUL ,  LACHENBRUCH ROGER ,  BOIARSKI MIKHAIL

Inventor： APPARAO TAMIRISA V V R ,  PODTCHERNIAEV OLEG ,  FLYNN KEVIN P ,  HALL PAUL ,  LACHENBRUCH ROGER ,  BOIARSKI MIKHAIL

IPC: F25D17/06 ,  F25B1/00 ,  F25B5/04 ,  F25B7/00 ,  F25B9/00 ,  F25D16/00 ,  F25B41/00

CPC classification number: F25B7/00 ,  F25B9/006 ,  F25D2400/28

Abstract: Disclosed is an ultra-low temperature, dual-compressor (114,144), recirculating gas chilling system that includes a closed-loop mixed-refrigerant primary refrigeration system (110) in combination with a closed-loop gas secondary refrigeration loop (112). The ultra-low temperature, dual-compressor (114,144), recirculating gas chilling system disclosed is capable of providing continuous long term chilled gas and fast cooling of a high or ambient temperature object (158), such as a chuck used in processing semiconductor wafers or any such device. The gas chilling system is characterized by three modes of operation: a normal cooling mode, a bakeout mode, and a post-bake cooling mode.

Abstract translation: 公开了一种超低温双压缩机（114,144）循环气体冷却系统，其包括与闭环气体二次制冷回路（112）组合的闭环混合制冷剂初级制冷系统（110）。 所公开的超低温双压缩机（114,144）再循环气体冷却系统能够提供连续的长期冷却气体并且快速冷却高温或环境温度物体（158），例如用于处理半导体晶片的卡盘 或任何此类设备。 燃气冷冻系统的特征在于三种操作模式：正常冷却模式，烘烤模式和后烘箱冷却模式。

公开(公告)号：WO0201096A3

公开(公告)日：2002-05-23

申请号：PCT/US0119797

申请日：2001-06-21

Applicant: IGC POLYCOLD SYSTEMS INC

Inventor： FLYNN KEVIN P

IPC: F16K47/10 ,  F25B9/00 ,  F25B41/04 ,  F25B41/06 ,  G01P13/00

CPC classification number: G01P13/0066 ,  F16K47/10 ,  F25B9/006 ,  F25B41/043 ,  F25B41/06

Abstract: Flow in a forward direction through a check valve (202) is detected by a signaling device in parallel with the check valve and sensing the pressure differential across the check valve. The signaling device outputs an electrical signal that indicates whether or not the pressure differential across the valve is sufficient to open the valve to flow. A flow restrictor such as a capillary tube (208) is in parallel with the check valve to by-pass a small portion of flow during normal operation and to equalize pressure across the check valve inlet and outlet when the check valve is otherwise closed to flow.

Abstract translation: 通过止回阀（202）沿向前方向的流动由信号装置与止回阀并联并检测止回阀两端的压力差。 信号装置输出一个电信号，指示阀门两端的压差是否足以打开阀门流动。 诸如毛细管（208）的限流器与止回阀平行，以在正常操作期间绕过一小部分流量，并且当止回阀以其它方式封闭流动时平衡止回阀入口和出口两端的压力 。

公开(公告)号：WO0140397A3

公开(公告)日：2001-12-06

申请号：PCT/US0042477

申请日：2000-12-01

Applicant: IGC POLYCOLD SYSTEMS INC

Inventor： FLYNN KEVIN P ,  BOIARSKI MIKHAIL ,  APPARAO TAMIRISA V V R ,  PODTCHERNIAEV OLEG ,  MOGORICHNY VLADIMIR

IPC: F25B1/00 ,  C09K5/04 ,  F25B9/00

CPC classification number: C09K5/045 ,  C09K2205/12 ,  C09K2205/122 ,  C09K2205/128 ,  C09K2205/13 ,  F25B9/006 ,  F25B2400/18

Abstract: Refrigerants containing R-22 are replaced with new blends by using R-125, or R-125 with R-124, or R-218, or R-218 with R-124, in place of R-22. No hardware or oil composition changes are required to maintain temperatures, pressures and capacity substantially unchanged in a refrigeration system.

Abstract translation: 通过使用R-125或R-125与R-124或R-218或R-218与R-124代替R-22，将含有R-22的制冷剂替换为新的混合物。 在制冷系统中不需要硬件或油成分的变化来维持温度，压力和容量基本不变。