公开(公告)号：WO2004051220A2

公开(公告)日：2004-06-17

申请号：PCT/US2003/037937

申请日：2003-11-25

Applicant: KLA-TENCOR TECHNOLOGIES CORPORATION

Inventor： STOKOWSKI, Stan ,  SAIDIN, Zain, K.

IPC: G01N

CPC classification number: G01M11/0264 ,  G01N21/95607

Abstract: Disclosed are methods and apparatus for altering the phase and/or amplitude of an optical beam within an inspection system (100, 200, 300) using one or more spatial light modulator(s) (SLMs) (108, 112, 122, 212, 220, 230, 312, 332, 320). In one embodiment, an apparatus for optically inspecting a sample with an optical beam is disclosed. The apparatus includes a beam generator (102, 202) for directing an incident optical beam onto the sample whereby at least a first portion of the incident optical beam is directed from the sample (118) as an output beam and a detector (126, 234, 336) positioned to receive at least a portion of the output beam. The detector is also operable to generate an output signal based on the output beam. The apparatus further includes one or more imaging optics (e.g., 224, 228, 226, 232) for directing the output beam to the detector and a programmable spatial light modulator (SLM) positioned within an optical path of the incident or output beam. The SLM is configurable to adjust a phase and/or amplitude profile of the incident beam or the output beam. The apparatus also has a control system (128, 236, 338) operable to configure the SLM to alter the phase and/or amplitude profile of the incident beam or the output beam. For example, the SLM may be configured to alter the illumination profile of the incident beam to achieve different inspection modes. In another example, the SLM may be configured to alter the phase and/or amplitude profile of the output beam so as to substantially eliminate aberrations produced by the imaging optics. In other embodiments, the apparatus may include two or more SLM's which are configurable to alter the phase and/or amplitude profile of both the incident beam and the output beam.

Abstract translation: 公开了使用一个或多个空间光调制器（SLM）（（SLM））来改变检查系统（100,200,300）内的光束的相位和/或振幅的方法和设备 108，112，122，212，220，230，312，332，320）。 在一个实施例中，公开了一种用光束光学检查样品的设备。 该设备包括用于将入射光束引导到样本上的束发生器（102,202），由此入射光束的至少第一部分作为输出束从样本（118）被引导，并且检测器（126,234 ，336）定位成接收输出光束的至少一部分。 检测器还可操作以基于输出光束产生输出信号。 该设备还包括用于将输出光束引导至检测器的一个或多个成像光学器件（例如，224,228,226,232）以及位于入射或输出光束的光路内的可编程空间光调制器（SLM）。 SLM可配置为调整入射光束或输出光束的相位和/或幅度分布。 该设备还具有控制系统（128,236,338），其可操作以配置SLM以改变入射光束或输出光束的相位和/或幅度分布。 例如，SLM可以被配置为改变入射光束的照射轮廓以实现不同的检查模式。 在另一个例子中，SLM可以被配置为改变输出光束的相位和/或幅度分布，从而基本上消除由成像光学器件产生的像差。 在其他实施例中，该设备可以包括两个或更多个SLM，其可配置为改变入射光束和输出光束的相位和/或幅度分布。