公开(公告)号：WO2023001795A1

公开(公告)日：2023-01-26

申请号：PCT/EP2022/070141

申请日：2022-07-19

Applicant: KONINKLIJKE PHILIPS N.V.

Inventor： PETIT, Didier Mathijs Maria Justina ,  SOETENS, Johannes Balthasar Maria ,  WARMERDAM, Thomas Petrus Hendricus ,  VERSCHUUREN, Marcus Antonius

IPC: G03F7/00 ,  G03F7/20

Abstract: An imprinting apparatus comprises a first carrier for carrying a flexible stamp and a second carrier movable relative to the first carrier and configured to carry a substrate having a resist layer. The second carrier comprises a chuck which comprises a hollow cylindrical body having atop face and a bottom face and a lattice arrangement between the top and bottom faces. The chuck has a reduced thermal mass while maintaining the required stiffness for maintaining a uniform imprint gap.

公开(公告)号：WO2023001797A1

公开(公告)日：2023-01-26

申请号：PCT/EP2022/070152

申请日：2022-07-19

Applicant: KONINKLIJKE PHILIPS N.V.

Inventor： PETIT, Didier Mathijs Maria Justina ,  VERSCHUUREN, Marcus Antonius ,  SOETENS, Johannes Balthasar Maria ,  EVERS, Wilhelmus Johannes Everardus ,  JANSSEN, Maurice Leonardus Johannes

IPC: G03F7/00 ,  G03F7/20

Abstract: An imprinting apparatus comprises a first carrier for carrying a flexible stamp and a second carrier movable relative to the first carrier and configured to carry a substrate having a resist layer.The second carrier comprises a chuck and a set of chuck actuators for translating a portion of the chuck in a Z-axis direction, Each chuck actuator comprises an actuator output and a lever arrangement between the actuator output and a chuck drive member. The lever arrangement enables an increase in positioning accuracy and increased stiffness, compared to the direct control of position using the actuator output.

公开(公告)号：WO2023001798A1

公开(公告)日：2023-01-26

申请号：PCT/EP2022/070153

申请日：2022-07-19

Applicant: KONINKLIJKE PHILIPS N.V.

Inventor： PETIT, Didier Mathijs Maria Justina ,  VERSCHUUREN, Marcus Antonius ,  BARENDT, Jens Udo ,  JANSSEN, Maurice Leonardus Johannes

IPC: G03F7/00 ,  G03F7/20

Abstract: An imprinting apparatus comprise a first carrier for carrying a flexible stamp and a second carrier movable relative to the first carrier and configured to carry a substrate having a resist layer. A stamp loader is movable between a position in and out of a space between the first and second carriers. The second carrier is movable towards the first carrier to move the stamp carrier and a held stamp towards the first carrier, so as to enable the held stamp to be transferred to the first carrier and held by suction channels of the first carrier. It can then be moved away from the first carrier thereby to return the empty stamp carrier to the frame.

公开(公告)号：WO2023001788A1

公开(公告)日：2023-01-26

申请号：PCT/EP2022/070125

申请日：2022-07-19

Applicant: KONINKLIJKE PHILIPS N.V.

Inventor： PETIT, Didier Mathijs Maria Justina ,  VERSCHUUREN, Marcus Antonius ,  SOETENS, Johannes Balthasar Maria ,  JANSSEN, Maurice Leonardus Johannes

IPC: G03F7/00 ,  G03F7/20

Abstract: An imprinting apparatus comprises a first carrier for carrying a flexible stamp, a set of carrier actuators for translating the first carrier in a direction parallel to a plane of the first carrier, and a second carrier movable relative to the first carrier and configured to carry a substrate having a resist layer. The second carrier comprises a chuck and a set of chuck actuators for translating a portion of the chuck in a direction perpendicular to a plane of the second carrier. This imprinting apparatus provides alignment between the flexible stamp and the substrate by controlling an in-plane position of the first carrier (so enabling X, Y and Rz position control) and controlling Z axis positions of the second carrier (so enabling Rx, Ry and Z position control). Thus, 6DOF position adjustment is enabled with a simple structure. Thus precise control of X,Y and Z translations and rotations is enabled while also enabling loading of substrates and/or stamps.