公开(公告)号：WO2016045961A1

公开(公告)日：2016-03-31

申请号：PCT/EP2015/070527

申请日：2015-09-09

Applicant: KONINKLIJKE PHILIPS N.V.

Inventor： VERSCHUUREN, Marcus Antonius

IPC: G03F7/00

CPC classification number: B29C37/00 ,  B29C59/02 ,  B29C2037/903 ,  G03F7/0002

Abstract: A method of transferring a flexible layer to a substrate makes use of a partial bulge in the flexible layer, which does not make contact with the substrate. The partial bulge advances to the location of an alignment marker on the substrate. When alignment adjustments are needed, they are made with the partial bulge in place so that more reproducible positioning is possible when fully advancing the flexible layer against the substrate.

Abstract translation: 将柔性层转移到基板的方法利用柔性层中的不与衬底接触的部分凸起。 部分凸起进入衬底上的对准标记的位置。 当需要对准调整时，它们被部分凸起制成，使得当将柔性层完全推向基板时，可以进行更可重复的定位。

公开(公告)号：WO2015180976A1

公开(公告)日：2015-12-03

申请号：PCT/EP2015/060821

申请日：2015-05-18

Applicant: KONINKLIJKE PHILIPS N.V.

Inventor： VERSCHUUREN, Marcus Antonius ,  LUNZ, Manuela ,  GUO, Ke ,  LOZANO BARBERO, Gabriel Sebastian ,  VAN BRAKEL, Remco

IPC: H01L33/50

CPC classification number: F21V9/30 ,  F21K9/64 ,  G02B5/008 ,  G02F1/017 ,  G02F1/01708 ,  G02F2001/01791 ,  H01L33/502

Abstract: There is provided an illumination device comprising: a wavelength converting layer comprising a photon emitting donor configured to absorb energy to reach an excited state, and a photon emitting acceptor; an energy source configured to provide energy to the donor such that the donor reach the excited state; wherein the donor and the acceptor are selected and arranged at a distance from each other such that non-radiative transfer of excitation energy from the donor to the acceptor occur, and wherein the acceptor is configured to emit a photon at a second wavelength after the transfer of energy; the illumination device further comprising a periodic plasmonic antenna array, arranged on the substrate and embedded within the wavelength converting layer, and comprising a plurality of individual antenna elements arranged in an antenna array plane, the plasmonic antenna array being configured to support a first lattice resonance at the second wavelength, arising from coupling of localized surface plasmon resonances in the individual antenna elements to photonic modes supported by the system comprising the plasmonic antenna array and the wavelength converting layer, wherein the plasmonic antenna array is configured to comprise plasmon resonance modes such that light emitted from the plasmonic antenna array has an anisotropic angle distribution.

Abstract translation: 提供了一种照明装置，包括：波长转换层，包括被配置为吸收能量以达到激发态的光子发射体，以及光子发射受体; 能量源，被配置为向施主提供能量，使得施主达到激发态; 其中所述施主和所述受体被选择并布置成彼此间隔一定距离，使得激发能量从施主到所述受体的非辐射转移发生，并且其中所述受体被配置为在所述转移之后以第二波长发射光子 的能量; 所述照明装置还包括周期性等离子体激元天线阵列，其布置在所述衬底上并且嵌入在所述波长转换层内，并且包括布置在天线阵列平面中的多个单独天线元件，所述等离子体激元天线阵列被配置为支持第一晶格共振 在第二波长处，由各个天线元件中的局部表面等离子体共振耦合到包括等离子体激元天线阵列和波长转换层的系统所支持的光子模式，其中等离子体激元天线阵列被配置为包括等离子体激元谐振模式，使得 从等离子体激元天线阵列发射的光具有各向异性角分布。

公开(公告)号：WO2023001798A1

公开(公告)日：2023-01-26

申请号：PCT/EP2022/070153

申请日：2022-07-19

Applicant: KONINKLIJKE PHILIPS N.V.

Inventor： PETIT, Didier Mathijs Maria Justina ,  VERSCHUUREN, Marcus Antonius ,  BARENDT, Jens Udo ,  JANSSEN, Maurice Leonardus Johannes

IPC: G03F7/00 ,  G03F7/20

Abstract: An imprinting apparatus comprise a first carrier for carrying a flexible stamp and a second carrier movable relative to the first carrier and configured to carry a substrate having a resist layer. A stamp loader is movable between a position in and out of a space between the first and second carriers. The second carrier is movable towards the first carrier to move the stamp carrier and a held stamp towards the first carrier, so as to enable the held stamp to be transferred to the first carrier and held by suction channels of the first carrier. It can then be moved away from the first carrier thereby to return the empty stamp carrier to the frame.

公开(公告)号：WO2014122565A1

公开(公告)日：2014-08-14

申请号：PCT/IB2014/058704

申请日：2014-01-31

Applicant: KONINKLIJKE PHILIPS N.V. ,  PHILIPS DEUTSCHLAND GMBH

Inventor： TIMMERING, Cornelis Eustatius ,  VERSCHUUREN, Marcus Antonius ,  LOPEZ, Toni ,  BALKENENDE, Abraham Rudolf

IPC: H01L33/22

CPC classification number: H01L33/22 ,  H01L33/0075

Abstract: The present invention relates to a light emitting device (100) comprising: a substrate (102); a light emitting diode structure (106) arranged on the substrate (102), the diode structure (106) comprising a first semiconducting layer (108), an active region (110) and a second semiconducting layer (112), wherein a light output surface of the diode structure comprises a plurality of protruding surface structures (104) each having a peak height, a sidewall slope (122) and orientation in relation to the substrate, the plurality of protruding structures (104) comprising a first set and a second set of protruding surface structures, the first set and second set of protruding surface structures differing by at least one of the peak height, sidewall slope and orientation in relation to the substrate. The invention also relates to a method for manufacturing a light emitting device where the protruding surface structures are formed by imprint lithography to form a three-dimensional pattern and subsequent etching.

Abstract translation: 本发明涉及一种发光器件（100），包括：衬底（102）; 布置在所述衬底（102）上的发光二极管结构（106），所述二极管结构（106）包括第一半导体层（108），有源区（110）和第二半导体层（112），其中光输出 二极管结构的表面包括各自具有峰高度的多个突出表面结构（104），侧壁倾斜度（122）和相对于衬底的取向，所述多个突出结构（104）包括第一组和第二组 一组突出的表面结构，第一组和第二组突出表面结构相对于基底的峰高，侧壁倾斜和取向中的至少一个不同。 本发明还涉及一种用于制造发光器件的方法，其中突出表面结构通过压印光刻形成以形成三维图案和随后的蚀刻。

公开(公告)号：WO2023001795A1

公开(公告)日：2023-01-26

申请号：PCT/EP2022/070141

申请日：2022-07-19

Applicant: KONINKLIJKE PHILIPS N.V.

Inventor： PETIT, Didier Mathijs Maria Justina ,  SOETENS, Johannes Balthasar Maria ,  WARMERDAM, Thomas Petrus Hendricus ,  VERSCHUUREN, Marcus Antonius

IPC: G03F7/00 ,  G03F7/20

Abstract: An imprinting apparatus comprises a first carrier for carrying a flexible stamp and a second carrier movable relative to the first carrier and configured to carry a substrate having a resist layer. The second carrier comprises a chuck which comprises a hollow cylindrical body having atop face and a bottom face and a lattice arrangement between the top and bottom faces. The chuck has a reduced thermal mass while maintaining the required stiffness for maintaining a uniform imprint gap.

公开(公告)号：WO2015181034A1

公开(公告)日：2015-12-03

申请号：PCT/EP2015/061191

申请日：2015-05-21

Applicant: KONINKLIJKE PHILIPS N.V.

Inventor： VERSCHUUREN, Marcus Antonius ,  LOZANO BARBERO, Gabriel Sebastian ,  GOMEZ RIVAS, Jaime

IPC: H01L33/50 ,  H01L33/58

CPC classification number: G02B5/008 ,  F21K9/64 ,  F21V9/30 ,  G02F1/29 ,  G02F2203/10 ,  H01L33/507 ,  H01L33/508 ,  H01L33/58

Abstract: There is provided an illumination device (100) comprising: a substrate (104); an optically transmissive first layer (106) arranged on the substrate; a photon emitting layer (108), arranged on the optically transmissive first layer and comprising a photon emitting material configured to receive energy from an energy source and to emit light having a predetermined wavelength; a periodic plasmonic antenna array, arranged on the substrate and embedded within the first layer, and comprising a plurality of individual antenna elements (114) arranged in an antenna array plane, the plasmonic antenna array being configured to support a first lattice resonance at the predetermined wavelength, arising from coupling of localized surface plasmon resonances in the individual antenna elements to photonic modes supported by the system comprising the plasmonic antenna array and the photon emitting layer, wherein the plasmonic antenna array is configured to comprise plasmon resonance modes such that light emitted from the plasmonic antenna array has an anisotropic angle distribution; and wherein the photon emitting layer is arranged at a distance from the antenna array plane corresponding to a location of maximum field enhancement for light out-coupling resulting from the plasmonic-photonic lattice resonances.

Abstract translation: 提供了一种照明装置（100），包括：基板（104）; 布置在所述基板上的透光性第一层（106）; 布置在光学透射的第一层上并包括被配置为从能量源接收能量并发射具有预定波长的光的光子发射材料的光子发射层（108） 周期性等离子体激元天线阵列，布置在衬底上并且嵌入在第一层内，并且包括布置在天线阵列平面中的多个单独的天线元件（114），所述等离子体激元天线阵列被配置为支持预定的第一晶格共振 波长，由各个天线元件中的局部表面等离子体共振耦合到包括等离子体激元天线阵列和光子发射层的系统所支持的光子模式产生，其中等离子体激元天线阵列被配置为包括等离子体激元谐振模式， 等离子体激元天线阵列具有各向异性角分布; 并且其中所述光子发射层被布置在与所述天线阵列平面相对应的距离处，所述天线阵列平面对应于由所述等离子体 - 光子晶格共振引起的光出耦合的最大场增强的位置。

公开(公告)号：WO2015180970A1

公开(公告)日：2015-12-03

申请号：PCT/EP2015/060719

申请日：2015-05-14

Applicant: KONINKLIJKE PHILIPS N.V.

Inventor： VERSCHUUREN, Marcus Antonius ,  LOZANO BARBERO, Gabriel Sebastian ,  GOMEZ RIVAS, Jaime ,  GUO, Ke

IPC: H01L33/50 ,  H01L33/58

CPC classification number: H01L33/58 ,  H01L33/507 ,  H01L33/508

Abstract: According to a first aspect of the invention, there is provided an illumination device (100) comprising: a light source (102) configured to emit light of a first wavelength; a wavelength converting layer (104) comprising a wavelength converting material configured to receive light from the light source, and further configured to convert light from the first wavelength to a second wavelength; a periodic plasmonic antenna array, arranged embedded within the wavelength converting layer, and comprising a plurality of individual antenna elements (108) arranged in an antenna array plane, the plasmonic antenna array being configured to support a first mode of surface lattice resonances at the second wavelength, arising from diffractive coupling of localized surface plasmon resonances in the individual antenna elements, wherein the plasmonic antenna array is configured to comprise plasmon resonance modes such that light emitted from the plasmonic antenna array has an anisotropic angle distribution; and wherein the light source is further arranged to emit light in the form of a plane wave (103) having an angle of incidence in relation to the antenna array plane such that an electric field intensity in the antenna elements, resulting from the said plasmonic-photonic lattice resonances, is minimized.

Abstract translation: 根据本发明的第一方面，提供了一种照明装置（100），包括：被配置为发射第一波长的光的光源（102） 波长转换层（104），包括被配置为从所述光源接收光的波长转换材料，并且还被配置为将来自所述第一波长的光转换成第二波长; 周期性等离子体激元天线阵列，其布置在所述波长转换层内，并且包括布置在天线阵列平面中的多个单独的天线元件（108），所述等离子体激元天线阵列被配置为在所述第二模式下支持表面格子共振的第一模式 波长，由各个天线元件中的局部表面等离子体共振的衍射耦合产生，其中等离子体激元天线阵列被配置为包括等离子体共振模式，使得从等离子体激元天线阵列发射的光具有各向异性角分布; 并且其中所述光源还被布置成发射具有相对于所述天线阵列平面的入射角的平面波（103）形式的光，使得由所述等离子体激发光产生的天线元件中的电场强度， 光子晶格共振被最小化。

公开(公告)号：WO2015011110A1

公开(公告)日：2015-01-29

申请号：PCT/EP2014/065656

申请日：2014-07-22

Applicant: KONINKLIJKE PHILIPS N.V.

Inventor： VAN BRAKEL, Remco ,  VERSCHUUREN, Marcus Antonius

IPC: G03F7/00 ,  B29C59/02

CPC classification number: B41N1/14 ,  B41C3/04 ,  B41F7/00 ,  B41K1/26 ,  B41K1/28 ,  G03F7/0002

Abstract: A method of manufacturing a patterned stamp (100) for patterning a contoured surface (10) is disclosed. The method comprises providing a pliable stamp layer (120) carrying a pattern of features (122), forcing the pliable stamp layer onto the contoured surface with said pattern of features facing the contoured surface; applying a fluid support layer (130) over the pliable stamp layer on the contoured surface; solidifying the support layer (140) to form the patterned stamp; and removing the patterned stamp from the contoured surface. A corresponding patterned stamp, imprinting method and imprinted article are also disclosed.

Abstract translation: 公开了一种用于图形化轮廓表面（10）的图案化印模（100）的制造方法。 该方法包括提供承载特征图案（122）的柔性印模层（120），将柔性印模层强制到轮廓表面上，所述特征图案面向轮廓表面; 将流体支撑层（130）施加在所述轮廓表面上的柔性印模层上; 固化支撑层（140）以形成图案化的印模; 并从轮廓表面去除图案化的印模。 还公开了相应的图案印记，印记方法和印记制品。

公开(公告)号：WO2023001788A1

公开(公告)日：2023-01-26

申请号：PCT/EP2022/070125

申请日：2022-07-19

Applicant: KONINKLIJKE PHILIPS N.V.

Inventor： PETIT, Didier Mathijs Maria Justina ,  VERSCHUUREN, Marcus Antonius ,  SOETENS, Johannes Balthasar Maria ,  JANSSEN, Maurice Leonardus Johannes

IPC: G03F7/00 ,  G03F7/20

Abstract: An imprinting apparatus comprises a first carrier for carrying a flexible stamp, a set of carrier actuators for translating the first carrier in a direction parallel to a plane of the first carrier, and a second carrier movable relative to the first carrier and configured to carry a substrate having a resist layer. The second carrier comprises a chuck and a set of chuck actuators for translating a portion of the chuck in a direction perpendicular to a plane of the second carrier. This imprinting apparatus provides alignment between the flexible stamp and the substrate by controlling an in-plane position of the first carrier (so enabling X, Y and Rz position control) and controlling Z axis positions of the second carrier (so enabling Rx, Ry and Z position control). Thus, 6DOF position adjustment is enabled with a simple structure. Thus precise control of X,Y and Z translations and rotations is enabled while also enabling loading of substrates and/or stamps.

公开(公告)号：WO2016102185A1

公开(公告)日：2016-06-30

申请号：PCT/EP2015/079048

申请日：2015-12-09

Applicant: KONINKLIJKE PHILIPS N.V.

Inventor： VAN BRAKEL, Remco ,  VERSCHUUREN, Marcus Antonius

IPC: G03F7/00

CPC classification number: G03F7/0002 ,  G03F7/0046 ,  G03F7/11 ,  G03F7/2012 ,  G03F7/70241 ,  H01L21/0274

Abstract: A method of manufacturing a patterned stamp (100) for patterning a contoured surface (10) is disclosed. The method comprises applying a layer (115) of a pliable material precursor over a master (50) carrying an inverse pattern (52) to form a desired pattern (112) in said layer; curing the pliable material precursor to form a pliable stamp layer (120) comprising said desired pattern; providing an intermediate stamp structure by adhering a porous pliable support layer (130) to the pliable stamp layer; releasing the intermediate stamp structure from the master; forcing the intermediate stamp structure onto the contoured surface with said pattern of features facing the contoured surface; forming the patterned stamp by filling the porous pliable support layer with a filler material to reduce the pliability of the support layer; and removing the patterned stamp from the contoured surface. A corresponding patterned stamp, imprinting method and imprinted article are also disclosed.

Abstract translation: 公开了一种用于图形化轮廓表面（10）的图案化印模（100）的制造方法。 该方法包括在承载逆图案（52）的主机（50）上施加柔性材料前体层（115）以在所述层中形成期望的图案（112）; 固化柔性材料前体以形成包含所述期望图案的柔性印模层（120）; 通过将多孔柔性支撑层（130）粘附到柔性印模层上来提供中间印模结构; 从主人释放中间邮票结构; 将中间印章结构强制到具有面向轮廓表面的所述特征图案的轮廓表面上; 通过用填充材料填充多孔柔性支撑层来形成图案化的印模，以降低支撑层的柔韧性; 并从轮廓表面去除图案化的印模。 还公开了相应的图案印记，印记方法和印记制品。