公开(公告)号：WO2011028599A3

公开(公告)日：2011-06-16

申请号：PCT/US2010046788

申请日：2010-08-26

Applicant: LAM RES CORP ,  RASNICK JOHN W ,  EGLEY FRED D

Inventor： RASNICK JOHN W ,  EGLEY FRED D

IPC: H01L21/02 ,  H01L21/68 ,  H05H1/46

CPC classification number: H01J37/32642 ,  H01J37/32623

Abstract: A direct drive arrangement for controlling pressure volume within a confinement region of a processing chamber of a plasma processing system during substrate processing is provided. The confinement region is a chamber volume surrounded by confinement rings is provided. The arrangement includes plunger assemblies configured for changing the pressure of motor assemblies configured for vertically moving the plunger assemblies, and recording set point position values for the plunger assemblies. The arrangement further includes a set of circuits configured for driving the motor assemblies to move the plunger assemblies to change the pressure volume within the confinement region. The set of circuits is also configured for providing power to the motor assemblies. The set of circuits is further configured for receiving the set point position values from the motor assemblies.

Abstract translation: 提供了用于在衬底处理期间控制等离子体处理系统的处理室的限制区域内的压力体积的直接驱动装置。 限制区域是由限制环包围的室容积。 该装置包括被配置为改变构造成用于垂直移动柱塞组件的马达组件的压力并记录柱塞组件的设定点位置值的柱塞组件。 该装置还包括一组电路，其被配置用于驱动马达组件以移动柱塞组件以改变约束区域内的压力体积。 该组电路还被配置为向马达组件提供动力。 该组电路还被配置为接收来自马达组件的设定点位置值。