公开(公告)号：WO2021118935A1

公开(公告)日：2021-06-17

申请号：PCT/US2020/063637

申请日：2020-12-07

Applicant: LAM RESEARCH CORPORATION

Inventor： MADSEN, Eric Russell ,  TORBATISARRAF, Seyedalireza ,  JIANG, Yu ,  BENYUHMIN, Naradhu Tai

IPC: C23C16/448 ,  B22F10/28 ,  B22F10/64 ,  B33Y10/00 ,  B33Y40/20 ,  B33Y80/00

Abstract: In some examples, a liquid precursor vaporizer comprises an inlet, an outlet, and a first vaporizer core, the first vaporizer core including a plurality of nested cells defining a plurality of tortuous paths through which a liquid precursor can pass in a path between the inlet and the outlet of the liquid precursor vaporizer.