公开(公告)号：WO2022103720A1

公开(公告)日：2022-05-19

申请号：PCT/US2021/058550

申请日：2021-11-09

Applicant: LAM RESEARCH CORPORATION

Inventor： GUO, Jian ,  ROHAM, Sassan ,  SAWLANI, Kapil ,  JIN, Xiaoqiang ,  DANEK, Michal ,  WILLIAMS, Brian Joseph ,  SOLOMON, Natan

IPC: H01L21/67 ,  G05B23/02

Abstract: Various embodiments herein relate to systems and methods for predictive maintenance for semiconductor manufacturing equipment. In some embodiments, a predictive maintenance system includes a processor that is configured to: receive offline data that indicates historical operating conditions and historical manufacturing information corresponding to manufacturing equipment that conducts a manufacturing process; calculate predicted equipment health status information by using a trained model that takes the offline data as an input; receive real-time data that indicates current operating conditions of the manufacturing equipment; calculate estimated equipment health status information by using the trained model that takes the real-time data as an input; calculate adjusted equipment health status information by combining the predicted equipment health status information and the estimated equipment health status information; and present the adjusted equipment health status information that includes an expected remaining useful life (RUL) of at least one component of the manufacturing equipment.