公开(公告)号：WO2019045957A1

公开(公告)日：2019-03-07

申请号：PCT/US2018/045428

申请日：2018-08-06

Applicant: LAM RESEARCH CORPORATION

Inventor： SILADIE, Cristian ,  ALBAREDE, Luc ,  KABOUZI, Yassine ,  MCINERNEY, Edward J. ,  ROHAM, Sassan

IPC: G01N21/3504 ,  G01N21/05 ,  G01N33/00 ,  G02B5/08

Abstract: A gas exhaust by-product measurement system is provided. A gas chamber is configured to receive exhaust from the exhaust output. A light source, light detector, and at least one optical element are positioned so that a light beam from the light source is directed to the at least one optical element a plurality of times before reaching the light detector. At least one heater provides heat to the at least one optical element. A plurality of purge gas nozzles are in fluid connection with the optical cavity. A high flow line is in fluid connection between a purge gas source and the plurality of purge gas nozzles. A low flow line is in fluid connection between the purge gas source and the plurality of purge gas nozzles. At least one flow controller manages a plurality of flow rates including a high flow and a low flow.

公开(公告)号：WO2022155635A1

公开(公告)日：2022-07-21

申请号：PCT/US2022/070118

申请日：2022-01-10

Applicant: LAM RESEARCH CORPORATION

Inventor： ROHAM, Sassan ,  DANEK, Michal ,  SAWLANI, Kapil

IPC: G06N3/04 ,  G06N3/08

Abstract: Various embodiments herein relate to systems, methods, and media for generating digital twins of semiconductor manufacturing equipment. In some embodiments, a digital twin of a process chamber of semiconductor manufacturing equipment is provided, comprising one or more non-transitory machine readable media comprising logic configured to implement: a first model of a first location of the process chamber; and a second model of a second location of the process chamber, wherein the first model is coupled to the second model, and wherein the first model and the second model are each of a model type that is one of: 1) an AI/ML model; 2) an HFS model; and 3) a closed-form solution, and wherein the first model and the second model each represent a class of physical phenomena that is one of: 1) thermal characteristics; 2) plasma characteristics; 3) fluid dynamics; 4) structural characteristics; and 5) chemical reactions.

公开(公告)号：WO2022103720A1

公开(公告)日：2022-05-19

申请号：PCT/US2021/058550

申请日：2021-11-09

Applicant: LAM RESEARCH CORPORATION

Inventor： GUO, Jian ,  ROHAM, Sassan ,  SAWLANI, Kapil ,  JIN, Xiaoqiang ,  DANEK, Michal ,  WILLIAMS, Brian Joseph ,  SOLOMON, Natan

IPC: H01L21/67 ,  G05B23/02

Abstract: Various embodiments herein relate to systems and methods for predictive maintenance for semiconductor manufacturing equipment. In some embodiments, a predictive maintenance system includes a processor that is configured to: receive offline data that indicates historical operating conditions and historical manufacturing information corresponding to manufacturing equipment that conducts a manufacturing process; calculate predicted equipment health status information by using a trained model that takes the offline data as an input; receive real-time data that indicates current operating conditions of the manufacturing equipment; calculate estimated equipment health status information by using the trained model that takes the real-time data as an input; calculate adjusted equipment health status information by combining the predicted equipment health status information and the estimated equipment health status information; and present the adjusted equipment health status information that includes an expected remaining useful life (RUL) of at least one component of the manufacturing equipment.

公开(公告)号：WO2022108707A1

公开(公告)日：2022-05-27

申请号：PCT/US2021/056339

申请日：2021-10-22

Applicant: LAM RESEARCH CORPORATION

Inventor： LEESER, Karl, Frederick ,  BAKER, Bradley, John ,  KESHAVAMURTHY, Arun ,  ROHAM, Sassan

IPC: H01L21/67 ,  H01L21/687 ,  C23C16/455 ,  C23C16/458 ,  H01J37/32

Abstract: A purge ring including a supply port configured for receiving gas. An outer channel is connected to the supply port. An outlet network is configured for an exit flow of the gas proximate to an inner diameter of the purge ring. The purge ring includes a plurality of channels configured for flow of the gas in a radial direction from the outer channel to the outlet network. The purge ring includes a plurality of passageways configured for reduced flow of the gas in the radial direction between the outer channel and the outlet network. The plurality of channels and the plurality of passageways are configured for providing a uniform pressure of the exit flow of the gas across the outlet network circumference.

公开(公告)号：WO2021154747A1

公开(公告)日：2021-08-05

申请号：PCT/US2021/015121

申请日：2021-01-26

Applicant: LAM RESEARCH CORPORATION

Inventor： SAWLANI, Kapil Umesh ,  DANEK, Michal ,  VELLANKI, Ravi ,  GOPINATH, Sanjay ,  COHEN, David G. ,  ROHAM, Sassan ,  SRIRAMAN, Saravanapriyan ,  HASKELL, Benjamin Allen ,  BROGAN, Lee J.

IPC: H01L21/66 ,  G05B15/02 ,  G05B17/02 ,  G06N20/00

Abstract: Methods, systems, and computer programs are presented for predicting the performance of semiconductor manufacturing equipment operations. One method includes an operation for obtaining machine-learning (ML) models, each model related to predicting a performance metric for an operation of a semiconductor manufacturing tool. Further, each ML model utilizes features defining inputs for the ML model. The method further includes an operation for receiving a process definition for manufacturing a product with the semiconductor manufacturing tool. One or more ML models are utilized to estimate a performance of the process definition used in the semiconductor manufacturing tool. Additionally, the method includes presenting, on a display, results showing the estimate of the performance of the manufacturing of the product. In some aspects, the use of hybrid models improves the predictive accuracy of the system by augmenting the capabilities of data-driven models with the reinforcement provided by the physics-based models.