公开(公告)号：WO2020096864A1

公开(公告)日：2020-05-14

申请号：PCT/US2019/059261

申请日：2019-10-31

Applicant: LAM RESEARCH CORPORATION

Inventor： THAULAD, Peter S. ,  HERZIG, Brett M. ,  BLANK, Richard M. ,  MOORING, Benjamin W.

IPC: H01L21/68 ,  H01L21/67 ,  H01L21/677 ,  H01L21/687 ,  H01L21/673

Abstract: Systems and techniques for determining and correcting inter-wafer misalignments in a stack of wafers transported by a wafer handling robot are discussed. An enhanced automatic wafer centering system is provided that may be used to determine a smallest circle associated with the stack of wafers, which may then be used to determine whether or not the stack of wafer meets various process requirements and/or if a centering correction can be made to better align the wafers with a receiving station coordinate frame.