公开(公告)号：WO2023043763A1

公开(公告)日：2023-03-23

申请号：PCT/US2022/043417

申请日：2022-09-14

Applicant: LAM RESEARCH CORPORATION

Inventor： PATERSON, Alexander, Miller ,  GUZMAN, Daniel ,  HART, William, T. ,  SILADIE, Cristian ,  MARTIN, Michael, John ,  WANG, Yuhou ,  DRYMON, Michael ,  DREWERY, John ,  CASTANOS-MARTINEZ, Eduardo ,  LUQUE, Jorge

IPC: H01J37/32 ,  G02B6/00

Abstract: A plasma processing chamber has an upper window with a coil disposed above the upper window. A coil connection enclosure is disposed above the coil. A metrology enclosure is disposed above the coil connection enclosure. A spectral reflectometry system is disposed within the metrology enclosure. The spectral reflectometry system includes an optical collimator positioned to direct a beam of light through an opening in the metrology enclosure, an opening in the coil connection enclosure, and the upper window into the plasma processing chamber. The optical collimator is also configured to receive reflected light from within the plasma processing chamber, where the reflected light passes through the upper window and through the opening in the coil connection enclosure and through the opening in the metrology enclosure. A tip angle and a tilt angle of the optical collimator are remotely adjusted to optimize an orientation of the optical collimator.

公开(公告)号：WO2020142451A1

公开(公告)日：2020-07-09

申请号：PCT/US2019/068981

申请日：2019-12-30

Applicant: LAM RESEARCH CORPORATION

Inventor： ALBAREDE, Luc ,  SILADIE, Cristian ,  RUAN, Lingyan

IPC: G01N21/35 ,  H01L21/67 ,  G01N21/59 ,  C23C16/44 ,  C23C14/56 ,  H01J37/32

Abstract: Various embodiments include apparatuses and methods using the apparatus. In one embodiment, the apparatus includes an adsorption sensor having a light source, and at least a first transparent-window and a second transparent-window mounted on substantially opposing walls in a process chamber through which radiation from the light source traverses. The first windows are selected to be substantially transparent at one or more wavelengths emitted by the light source. A light-source detector is configured to receive radiation transmitted through the second transparent-window and provide an intensity level of the received radiation that includes transmission losses through the first transparent-window and the second transparent-window due to adsorbed films on the windows. Other apparatuses and systems are disclosed.

公开(公告)号：WO2023043751A1

公开(公告)日：2023-03-23

申请号：PCT/US2022/043393

申请日：2022-09-13

Applicant: LAM RESEARCH CORPORATION

Inventor： PATERSON, Alexander, Miller ,  GUZMAN, Daniel ,  HART, William, T. ,  SILADIE, Cristian ,  MARTIN, Michael, John ,  WANG, Yuhou ,  DRYMON, Michael ,  DREWERY, John ,  O'NEILL, Robert, Griffith ,  ALBAREDE, Luc ,  OCAMPO, Neil, Simon

IPC: H01J37/32

Abstract: A radiofrequency calibration system for a direct-drive radiofrequency power supply includes a reference box that includes a reference circuit for converting a non-reference input impedance to a reference output impedance. The reference box has an input connector electrically connected to a radiofrequency output coupling of the direct-drive radiofrequency power supply. A radiofrequency power meter has a radiofrequency power input electrically connected to an output connector of the reference box. The radiofrequency power meter has an input impedance and an output impedance that substantially match the reference output impedance of the reference box. A cable has a first end electrically connected to a radiofrequency power output of the radiofrequency power meter and a second end connected to a test load that has an impedance that substantially matches the reference output impedance of the reference box. A controller is connected in data communication with a data interface of the radiofrequency power meter.

公开(公告)号：WO2019045957A1

公开(公告)日：2019-03-07

申请号：PCT/US2018/045428

申请日：2018-08-06

Applicant: LAM RESEARCH CORPORATION

Inventor： SILADIE, Cristian ,  ALBAREDE, Luc ,  KABOUZI, Yassine ,  MCINERNEY, Edward J. ,  ROHAM, Sassan

IPC: G01N21/3504 ,  G01N21/05 ,  G01N33/00 ,  G02B5/08

Abstract: A gas exhaust by-product measurement system is provided. A gas chamber is configured to receive exhaust from the exhaust output. A light source, light detector, and at least one optical element are positioned so that a light beam from the light source is directed to the at least one optical element a plurality of times before reaching the light detector. At least one heater provides heat to the at least one optical element. A plurality of purge gas nozzles are in fluid connection with the optical cavity. A high flow line is in fluid connection between a purge gas source and the plurality of purge gas nozzles. A low flow line is in fluid connection between the purge gas source and the plurality of purge gas nozzles. At least one flow controller manages a plurality of flow rates including a high flow and a low flow.