公开(公告)号：WO2020142241A1

公开(公告)日：2020-07-09

申请号：PCT/US2019/067609

申请日：2019-12-19

Applicant: MICRON TECHNOLOGY, INC.

Inventor： MARR, Kenneth William ,  CERAFOGLI, Chiara ,  PICCARDI, Michele ,  TIBURZI, Marco-Domenico ,  FREEMAN, Eric Higgins ,  TOMAYER, Joshua Daniel

IPC: G01L1/18 ,  G01L1/16 ,  H01L29/84

Abstract: A microelectronic chip device includes a semiconductor substrate and multiple on-chip strain sensors (OCSSs) constructed on the substrate at various locations of the substrate. The OCSSs may each include multiple piezoresistive devices configured to sense a strain at a location of the various locations and produce a strain signal representing the strain at that location. A strain measurement circuit may also be constructed on the semiconductor substrate and configured to measure strain parameters from the strain signals produced by the OCSSs. The strain parameters represent the strains at the various location. Values of the strain parameters can be used for analysis of mechanical stress on the chip device.