公开(公告)号：WO2015080548A1

公开(公告)日：2015-06-04

申请号：PCT/MY2014/000113

申请日：2014-05-26

Applicant: MIMOS BERHAD

Inventor： BIEN, Daniel Chia Seng ,  MOHSEN, Nabipoor ,  TEH, Aun Shih ,  LEE, Wai Yee ,  LEE, Hing Wah

IPC: G01L9/00

CPC classification number: G01L9/0055

Abstract: The present invention relates to a piezoresistive pressure sensor which detects applied pressure by measuring the change of electrical conductivity of the magnetic nanoparticles (3) in response to the application of mechanical stress onto the diaphragm (1). The pressure sensor comprises conductive electrodes (2) formed on the diaphragm (1) which is provided on a substrate (4). Magnetic nanoparticles (3) are deposited on the conductive electrodes (2) for electrically connecting the conductive electrodes (2) and changing electrical conductivity when stress is applied.

Abstract translation: 压阻式压力传感器本发明涉及一种压阻式压力传感器，其通过测量磁性纳米颗粒（3）响应于在膜片（1）上施加机械应力的电导率的变化来检测施加的压力。 压力传感器包括形成在隔膜（1）上的设置在基板（4）上的导电电极（2）。 在导电电极（2）上沉积磁性纳米颗粒（3），用于电连接导电电极（2），并在施加应力时改变电导率。