公开(公告)号：WO2016195941A1

公开(公告)日：2016-12-08

申请号：PCT/US2016/031851

申请日：2016-05-11

Applicant: MKS INSTRUMENTS, INC.

Inventor： GARUTI, Marco ,  MORRESI, Marco ,  CUPELLO, Roberto ,  BALOCCHI, Paolo ,  BOTTI, Claudio ,  GARUTI, Francesco

IPC: H03F3/60 ,  H03F3/195 ,  H03F3/21

CPC classification number: H03F3/211 ,  H01P1/36 ,  H01P5/18 ,  H03F3/195 ,  H03F3/602 ,  H03F2200/204 ,  H03F2200/405 ,  H03F2200/408 ,  H03F2200/451 ,  H03F2203/21142

Abstract: A microwave generator and power amplifier system (100) for the same are provided. The power amplifier system (100) can include a first power amplifier unit (110) that can receive an input power signal and can provide an output power signal. A power splitter unit (125) can receive the output power signal and can generate a plurality of split power input signals. The split power input signals can be received by a second power amplifier unit (160) that can provide a plurality of split power output signals. At least one isolator unit (175) that can couple at least part of the second power amplifier unit (160) with a power combiner unit (180). The power combiner unit (180) can receive the plurality of split power output signals from the second power amplifier unit (160) via the at least one isolator unit (175) and can combine the plurality of split power output signals.

Abstract translation: 提供了一种用于其的微波发生器和功率放大器系统（100）。 功率放大器系统（100）可以包括能够接收输入功率信号并且可以提供输出功率信号的第一功率放大器单元（110）。 功率分配器单元（125）可以接收输出功率信号并且可以产生多个分离的功率输入信号。 分开的功率输入信号可以由能够提供多个分离功率输出信号的第二功率放大器单元（160）接收。 至少一个能够将第二功率放大器单元（160）的至少一部分耦合到功率组合器单元（180）的隔离器单元（175）。 功率组合器单元（180）可以经由至少一个隔离器单元（175）从第二功率放大器单元（160）接收多个分离功率输出信号，并且可以组合多个分离功率输出信号。

公开(公告)号：WO2023076278A1

公开(公告)日：2023-05-04

申请号：PCT/US2022/047737

申请日：2022-10-25

Applicant: MKS INSTRUMENTS, INC.

Inventor： GARUTI, Marco ,  BRAGHIROLI, Francesco ,  BALOCCHI, Paolo ,  MASSA, Mario

IPC: H02M1/42 ,  H02M1/08 ,  H02M1/00

Abstract: A power supply apparatus, comprising at least one circuit board having thereon at least a first single phase power factor controlled (PEC) circuit, and a second PEC corrected circuit, the first single phase PEC circuit and the second PEC corrected circuit each having at least one PEC device in communication with at least one inverter, at least one resonant (EC) circuit positioned on the at least one circuit board and in electrical communication with at least one of the first single phase PEC circuit and the second PEC corrected circuit, at least one transformer in communication with at least one of the first single phase PEC circuit and the second PEC corrected circuit via the at least one EC resonant circuit, the at least one transformer configured to generate at least one transformer output signal, and at least one capacitor in communication with the at least one transformer and configured to output at least one magnetron input signal in response to the at least one transformer output signal, and at least one power supply generating at least one three phase input voltage, the at least one circuit board in communication with the at least one power supply.

公开(公告)号：WO2021066925A1

公开(公告)日：2021-04-08

申请号：PCT/US2020/042451

申请日：2020-07-17

Applicant: MKS INSTRUMENTS, INC.

Inventor： BRAGHIROLI, Francesco ,  BALOCCHI, Paolo

IPC: H01J23/05 ,  H01J23/10 ,  H01J23/20 ,  C23C14/35

Abstract: A microwave magnetron includes a cathode for emitting electrons, a filament for receiving a filament current to heat the cathode to enable to cathode to emit the electrons, and an anode to which anodic power can be applied to affect a flow of the electrons. An anodic power input receives the anodic power to be applied to the anode, the anodic power being characterized by an anodic current, an anodic voltage, and an anodic impedance, the anodic impedance being a quotient of the anodic voltage and the anodic current. An electromagnet power input receives electromagnet power and applies the electromagnet power to an electromagnet to control an intensity of a magnetic field, the electromagnet power being characterized by an electromagnet current. A controller adjusts at least one of the parameters of the magnetron to affect the flow of electrons while maintaining the anodic impedance constant.