公开(公告)号：WO2002075762A1

公开(公告)日：2002-09-26

申请号：PCT/US2002/005275

申请日：2002-02-20

Applicant: MOTOROLA, INC., A CORPORATION OF THE STATE OF DELAWARE

Inventor： PAVIO, Anthony, M. ,  HUANG, Jenn-Hwa ,  GU, Wang-Chang

IPC: H01H19/00

CPC classification number: H01H1/0036 ,  H01H19/00

Abstract: A microelectromechanical system (MEMS) switch assembly (10) and a method of forming the MEMBS switch assembly (10) is provided that includes a switching member (12) having a first portion (34) that is at least partially formed with a first material having a first dielectric constant and a second portion (36) that is at least partially formed with a second material having a second dielectric constant. Furthermore, the switching member (12) further includes a first lead (14) spaced apart from a second lead (16) for contacting the switching member (12). In operation, the switching member (12) is configured for movement such that the first portion (34) and second portion (36) of the switching member (12) can provide variable electrical connections between the first lead (14) and second lead (16).

Abstract translation: 提供了一种微机电系统（MEMS）开关组件（10）和形成MEMBS开关组件（10）的方法，其包括具有第一部分（34）的开关构件（12），该第一部分至少部分地形成有第一材料 具有第一介电常数和第二部分（36），其至少部分地由具有第二介电常数的第二材料形成。 此外，切换构件（12）还包括与用于接触切换构件（12）的第二引线（16）间隔开的第一引线（14）。 在操作中，切换构件（12）构造成使得切换构件（12）的第一部分（34）和第二部分（36）能够在第一引线（14）和第二引线（14）之间提供可变的电连接 16）。